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Taichi Yoshioka
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Utsunomiya-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Patterning method, lithography apparatus, and article manufacturing...
Patent number
10,466,602
Issue date
Nov 5, 2019
Canon Kabushiki Kaisha
Taichi Yoshioka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING SYSTEM AND ITS CONTROL METHOD
Publication number
20240055283
Publication date
Feb 15, 2024
Canon Kabushiki Kaisha
TAICHI YOSHIOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERNING METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...
Publication number
20190072864
Publication date
Mar 7, 2019
Canon Kabushiki Kaisha
Taichi Yoshioka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY