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Taiji Hashimoto
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Miyagi-ken, JP
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Patents Grants
last 30 patents
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Patent Grant
Gas recovering apparatus
Patent number
6,436,353
Issue date
Aug 20, 2002
Kabushiki Kaisha UltraClean Technology Research Institute
Tadahiro Ohmi
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Patents Applications
last 30 patents
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Patent Application
Gas recovering apparatus, vacuum exhausting method, and vacuum exha...
Publication number
20030152495
Publication date
Aug 14, 2003
Tadahiro Ohmi
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL