Taiki KATOU

Follow

Person

Tsukuba City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming method for SiC film
- Patent number 11,041,239
- Issue date Jun 22, 2021
- Tokyo Electron Limited
- Taiki Katou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 9,926,624
- Issue date Mar 27, 2018
- Tokyo Electron Limited
- Kazuki Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method, storage medium and etching apparatus
- Patent number 9,390,933
- Issue date Jul 12, 2016
- Tokyo Electron Limited
- Kensaku Narushima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING METHOD FOR SiC FILM
- Publication number 20200063262
- Publication date Feb 27, 2020
- TOKYO ELECTRON LIMITED
- Taiki KATOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20150368802
- Publication date Dec 24, 2015
- TOKYO ELECTRON LIMITED
- Kazuki YAMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METHOD, STORAGE MEDIUM AND ETCHING APPARATUS
- Publication number 20150187593
- Publication date Jul 2, 2015
- TOKYO ELECTRON LIMITED
- Kensaku NARUSHIMA
- H01 - BASIC ELECTRIC ELEMENTS