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Tain-Chen Hu
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Pingtung city, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Container flush and gas charge system and method
Patent number
6,688,344
Issue date
Feb 10, 2004
Taiwan Semiconductor Manufacturing Co., Ltd
Tain-Chen Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for determining end-point in a chamber cleanin...
Patent number
6,553,335
Issue date
Apr 22, 2003
Taiwan Semiconductor Manufacturing Co., Ltd
Jim-Jey Huang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CONTAINER FLUSH AND GAS CHARGE SYSTEM AND METHOD
Publication number
20030221744
Publication date
Dec 4, 2003
Taiwan Semiconductor Manufacturing Co., Ltd.
Tain-Chen Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for determining end-point in a chamber cleanin...
Publication number
20020198682
Publication date
Dec 26, 2002
Taiwan Semiconductor Manufacturing Co., Ltd.
Jim-Jey Huang
H01 - BASIC ELECTRIC ELEMENTS