Taisei Inoue

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,862,474
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Taisei Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid processing apparatus and liquid processing method
- Patent number 11,798,819
- Issue date Oct 24, 2023
- Tokyo Electron Limited
- Kazuki Kosai
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
- Publication number 20210398828
- Publication date Dec 23, 2021
- TOKYO ELECTRON LIMITED
- Kazuki Kosai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210175093
- Publication date Jun 10, 2021
- TOKYO ELECTRON LIMITED
- Taisei Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...