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Taisuke Yonemura
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Chiyoda-ku, JP
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Patents Grants
last 30 patents
Information
Patent Grant
CVD apparatus and method of cleaning the CVD apparatus
Patent number
8,277,560
Issue date
Oct 2, 2012
National Institute of Advanced Industrial Science and Technology
Katsuo Sakai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processes and equipments for preparing F2-containing gases, as well...
Patent number
7,919,141
Issue date
Apr 5, 2011
Kanto Denka Kogyo Co., Ltd.
Takashi Tanioka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process for producing carbonyl fluoride
Patent number
7,332,628
Issue date
Feb 19, 2008
National Institute of Advanced Industrial Science and Technology
Yuki Mitsui
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Plasma cleaning gas and plasma cleaning method
Patent number
7,322,368
Issue date
Jan 29, 2008
Akira Sekiya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cleaning gas and etching gas
Patent number
7,138,364
Issue date
Nov 21, 2006
Asahi Glass Company, Limited
Yutaka Ohira
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cleaning gases and etching gases
Patent number
6,787,053
Issue date
Sep 7, 2004
Asahi Glass Company, Limited
Akira Sekiya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PROCESSES AND EQUIPMENTS FOR PREPARING F2-CONTAINING GASES, AS WELL...
Publication number
20100206480
Publication date
Aug 19, 2010
KANTO DENKA KOGYO CO., LTD.
Takashi Tanioka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Processes and equipments for preparing F2-containing gases, as well...
Publication number
20090047792
Publication date
Feb 19, 2009
Takashi Tanioka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Process for producing carbonyl fluoride
Publication number
20060194985
Publication date
Aug 31, 2006
Research Inst. Of Innovative Tech. For The Earth
Yuki Mitsui
C01 - INORGANIC CHEMISTRY
Information
Patent Application
Cvd apparatus having means for cleaning with fluorine gas and metho...
Publication number
20050252451
Publication date
Nov 17, 2005
Tatsuro Beppu
B08 - CLEANING
Information
Patent Application
Cvd apparatus and method of cleaning the cvd apparatus
Publication number
20040255854
Publication date
Dec 23, 2004
Katsuo Sakai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Cvd apparatus and method of cleaning the cvd apparatus
Publication number
20040250775
Publication date
Dec 16, 2004
Katsuo Sakai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Cleaning gas and etching gas
Publication number
20040173569
Publication date
Sep 9, 2004
Yutaka Ohira
B08 - CLEANING
Information
Patent Application
Plasma cleaning gas and plasma cleaning method
Publication number
20040016441
Publication date
Jan 29, 2004
Akira Sekiya
B08 - CLEANING
Information
Patent Application
Cleaning gasses and etching gases
Publication number
20030001134
Publication date
Jan 2, 2003
Akira Sekiya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...