Taizo OKADA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus, power supply unit and mounting table s...
- Patent number 9,646,867
- Issue date May 9, 2017
- Tokyo Electron Limited
- Masahiko Konno
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS, POWER SUPPLY UNIT AND MOUNTING TABLE S...
- Publication number 20150109716
- Publication date Apr 23, 2015
- TOKYO ELECTRON LIMITED
- Masahiko KONNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20150107773
- Publication date Apr 23, 2015
- TOKYO ELECTRON LIMITED
- Masayuki SHINTAKU
- H01 - BASIC ELECTRIC ELEMENTS