Takaaki Hirooka

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Nirasaki-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Cooling apparatus and plasma processing apparatus having cooling ap...
- Patent number 7,000,416
- Issue date Feb 21, 2006
- Tokyo Electron Limited
- Takaaki Hirooka
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Processing apparatus and processing apparatus maintenance method
- Patent number 6,993,919
- Issue date Feb 7, 2006
- Tokyo Electron Limited
- Takaaki Hirooka
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Plasma processing device, its maintenance method, and its installat...
- Patent number 6,700,089
- Issue date Mar 2, 2004
- Tokyo Electron Limited
- Takaaki Hirooka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processor and temperature control method therefor
- Patent number 6,629,423
- Issue date Oct 7, 2003
- Tokyo Electron Limited
- Takaaki Hirooka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cart for mounting/demounting wafer transfer robot
- Patent number 6,579,056
- Issue date Jun 17, 2003
- Tokyo Electron Limited
- Yoshiaki Sasaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLANE HEATING FILM FOR INTEGRATED GAS SUPPLY SYSTEM, AND METHOD OF...
- Publication number 20130334204
- Publication date Dec 19, 2013
- Mitsuyoshi AIZAWA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Atmospheric transfer chamber, processed object transfer method, pro...
- Publication number 20060207971
- Publication date Sep 21, 2006
- TOKYO ELECTRON LIMITED
- Tsuyoshi Moriya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing apparatus and processing apparatus maintenance method
- Publication number 20050155373
- Publication date Jul 21, 2005
- TOKYO ELECTRON LIMITED
- Takaaki Hirooka
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
Electrode cooler of processing device
- Publication number 20040068997
- Publication date Apr 15, 2004
- Takaaki Hirooka
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
Cart for mounting/demounting wafer transfer robot
- Publication number 20010048871
- Publication date Dec 6, 2001
- Yoshiaki Sasaki
- H01 - BASIC ELECTRIC ELEMENTS