TREA

Takaaki Kato

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  • Miyagi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Film formation method and film formation device
    • Patent number 12,168,825
    • Issue date Dec 17, 2024
    • Tokyo Electron Limited
    • Michitaka Aita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 11,139,147
    • Issue date Oct 5, 2021
    • Tokyo Electron Limited
    • Toshihiko Iwao
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 10,370,763
    • Issue date Aug 6, 2019
    • Tokyo Electron Limited
    • Takahiro Hirano
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents