Takaaki KIKUCHI

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Edge ring, substrate support, substrate processing apparatus and me...
- Patent number 11,984,301
- Issue date May 14, 2024
- Tokyo Electron Limited
- Takashi Taira
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230326725
- Publication date Oct 12, 2023
- TOKYO ELECTRON LIMITED
- Shuichi TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING, SUBSTRATE SUPPORT, SUBSTRATE PROCESSING APPARATUS AND ME...
- Publication number 20210035783
- Publication date Feb 4, 2021
- TOKYO ELECTRON LIMITED
- Takashi TAIRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210005477
- Publication date Jan 7, 2021
- TOKYO ELECTRON LIMITED
- Ryou Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20200098550
- Publication date Mar 26, 2020
- TOKYO ELECTRON LIMITED
- Shuichi TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS