Takaaki Matsushima

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Atsugi-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Blanking aperture array device for multi-beams, and fabrication met...
- Patent number 9,530,610
- Issue date Dec 27, 2016
- NuFlare Technology, Inc.
- Kazuhiro Chiba
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
BLANKING APERTURE ARRAY DEVICE FOR MULTI-BEAMS, AND FABRICATION MET...
- Publication number 20160155600
- Publication date Jun 2, 2016
- NuFlare Technology, Inc.
- Kazuhiro CHIBA
- H01 - BASIC ELECTRIC ELEMENTS