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Load port and EFEM
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Patent number 10,727,100
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Issue date Jul 28, 2020
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Sinfonia Technology Co., Ltd.
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Mitsutoshi Ochiai
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H01 - BASIC ELECTRIC ELEMENTS
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Load port and EFEM
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Patent number 10,340,168
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Issue date Jul 2, 2019
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Sinfonia Technology Co., Ltd.
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Mitsutoshi Ochiai
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H01 - BASIC ELECTRIC ELEMENTS
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Purge apparatus and load port
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Patent number 9,508,579
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Issue date Nov 29, 2016
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Sinfonia Technology Co., Ltd.
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Takaaki Nakano
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H01 - BASIC ELECTRIC ELEMENTS