Takaaki Nezu

Follow

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Manufacturing method of showerhead for plasma processing apparatus
- Patent number 10,978,275
- Issue date Apr 13, 2021
- Tokyo Electron Limited
- Takaaki Nezu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas introduction plate for plasma etching apparatus for etching sem...
- Patent number D911985
- Issue date Mar 2, 2021
- Tokyo Electron Limited
- Takaaki Nezu
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Plasma etching method
- Patent number 9,048,191
- Issue date Jun 2, 2015
- Tokyo Electron Limited
- Shuichiro Uda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitive coupling plasma processing apparatus
- Patent number 7,767,055
- Issue date Aug 3, 2010
- Tokyo Electron Limited
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focus ring for semiconductor treatment and plasma treatment device
- Patent number 7,678,225
- Issue date Mar 16, 2010
- Tokyo Electron Limited
- Takaaki Nezu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TRAP APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210384017
- Publication date Dec 9, 2021
- TOKYO ELECTRON LIMITED
- Takaaki NEZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD ASSEMBLY AND PROCESSING APPARATUS
- Publication number 20190362947
- Publication date Nov 28, 2019
- TOKYO ELECTRON LIMITED
- Takaaki NEZU
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PLASMA ETCHING METHOD
- Publication number 20140113450
- Publication date Apr 24, 2014
- TOKYO ELECTRON LIMITED
- Shuichiro Uda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Capacitive coupling plasma processing apparatus
- Publication number 20060118044
- Publication date Jun 8, 2006
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Focus ring for semiconductor treatment and plasma treatment device
- Publication number 20040074605
- Publication date Apr 22, 2004
- Takaaki Nezu
- H01 - BASIC ELECTRIC ELEMENTS