Takafumi Chida

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Chigasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Defect inspection method and device therefor
- Patent number 9,148,631
- Issue date Sep 29, 2015
- Hitachi High-Technologies Corporation
- Makoto Ono
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Vacuum processing apparatus and operating method of vacuum processi...
- Patent number 9,011,065
- Issue date Apr 21, 2015
- Hitachi High-Technologies Corporation
- Susumu Tauchi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
VACUUM PROCESSING SYSTEM AND VACUUM PROCESSING METHOD OF SEMICONDUC...
- Publication number 20150194327
- Publication date Jul 9, 2015
- Hitachi High-Technologies Corporation
- Susumu TAUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT INSPECTION METHOD AND DEVICE THEREFOR
- Publication number 20130235182
- Publication date Sep 12, 2013
- Makoto Ono
- G01 - MEASURING TESTING
Information Patent Application
VACUUM PROCESSING SYSTEM AND VACUUM PROCESSING METHOD OF SEMICONDUC...
- Publication number 20110110752
- Publication date May 12, 2011
- Hitachi High-Technologies Corporation
- Susumu TAUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING SYSTEM AND VACUUM PROCESSING METHOD OF SEMICONDUC...
- Publication number 20110110751
- Publication date May 12, 2011
- Susumu TAUCHI
- H01 - BASIC ELECTRIC ELEMENTS