Takafumi Kawasaki

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Patents Grantslast 30 patents

Information Patent Grant
Illumination optical system, exposure apparatus, and device manufac...
- Patent number 8,098,365
- Issue date Jan 17, 2012
- Canon Kabushiki Kaisha
- Takafumi Kawasaki
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFAC...
- Publication number 20080212061
- Publication date Sep 4, 2008
- Canon Kabushiki Kaisha
- Takafumi Kawasaki
- G02 - OPTICS