Takafumi Kimura

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Nirasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film formation device, substrate processing device, and film format...
- Patent number 9,583,312
- Issue date Feb 28, 2017
- Tokyo Electron Limited
- Jun Yamawaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 9,236,226
- Issue date Jan 12, 2016
- Tokyo Electron Limited
- Jun Yamawaku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, plasma generating apparatus, antenna s...
- Patent number 9,167,680
- Issue date Oct 20, 2015
- Tokyo Electron Limited
- Yohei Yamazawa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Film deposition apparatus, substrate processing apparatus and film...
- Patent number 9,111,747
- Issue date Aug 18, 2015
- Tokyo Electron Limited
- Jun Yamawaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF DEPOSITING A FILM
- Publication number 20140220260
- Publication date Aug 7, 2014
- TOKYO ELECTRON LIMITED
- Jun Yamawaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION DEVICE, SUBSTRATE PROCESSING DEVICE, AND FILM FORMAT...
- Publication number 20140170859
- Publication date Jun 19, 2014
- TOKYO ELECTRON LIMITED
- Jun YAMAWAKU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA GENERATING APPARATUS, ANTENNA S...
- Publication number 20140062296
- Publication date Mar 6, 2014
- TOKYO ELECTRON LIMITED
- Yohei YAMAZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM DEPOSITION APPARATUS, SUBSTRATE PROCESSING APPARATUS AND FILM...
- Publication number 20130337635
- Publication date Dec 19, 2013
- Jun YAMAWAKU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20120241092
- Publication date Sep 27, 2012
- TOKYO ELECTRON LIMITED
- Jun Yamawaku
- H01 - BASIC ELECTRIC ELEMENTS