Takafumi KINUTA

Person

Shizuoka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning solution, and using the same, method for manufac...
- Patent number 12,068,150
- Issue date Aug 20, 2024
- Merck Patent GmbH
- Takafumi Kinuta
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Substrate processing method
- Patent number 11,901,173
- Issue date Feb 13, 2024
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,260,431
- Issue date Mar 1, 2022
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,211,241
- Issue date Dec 28, 2021
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,792,712
- Issue date Oct 6, 2020
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Void forming composition, semiconductor device provided with voids...
- Patent number 10,435,555
- Issue date Oct 8, 2019
- AZ Electronic Materials (Luxembourg) S.a.r.l.
- Shigemasa Nakasugi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Composition for forming topcoat layer and resist pattern formation...
- Patent number 9,482,952
- Issue date Nov 1, 2016
- AZ Electronic Materials (Luxembourg) S.A.R.L.
- Xiaowei Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SURFACE TREATING SOLUTION, AND USING THE SAME, METHOD FOR...
- Publication number 20240174951
- Publication date May 30, 2024
- Merck Patent GmbH
- Takafumi KINUTA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SUBSTRATE CLEANING SOLUTION, AND USING THE SAME, METHOD FOR MANUFAC...
- Publication number 20230235254
- Publication date Jul 27, 2023
- Merck Patent GmbH
- Takafumi KINUTA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
REPLACEMENT LIQUID OF LIQUID FILLING BETWEEN RESIST PATTERNS, AND M...
- Publication number 20230045307
- Publication date Feb 9, 2023
- Merch Patent GmbH
- Kazuma YAMAMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20220076941
- Publication date Mar 10, 2022
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING SOLUTION, AND USING THE SAME, METHOD FOR MANUFAC...
- Publication number 20220059344
- Publication date Feb 24, 2022
- Merck Patent GmbH
- Takafumi KINUTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING SOLUTION AND METHOD FOR MANUFACTURING DEVICE
- Publication number 20220056383
- Publication date Feb 24, 2022
- Merck Patent GmbH
- Takafumi KINUTA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200384510
- Publication date Dec 10, 2020
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190371599
- Publication date Dec 5, 2019
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190366394
- Publication date Dec 5, 2019
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SACRIFICIAL FILM COMPOSITION, METHOD FOR PREPARING SAME, SEMICONDUC...
- Publication number 20170218227
- Publication date Aug 3, 2017
- AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.a.r.l.
- Shigemasa NAKASUGI
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
VOID FORMING COMPOSITION, SEMICONDUCTOR DEVICE PROVIDED WITH VOIDS...
- Publication number 20170210896
- Publication date Jul 27, 2017
- AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.a.r.l.
- Shigemasa NAKASUGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITION FOR FORMING TOPCOAT LAYER AND RESIST PATTERN FORMATION...
- Publication number 20160011510
- Publication date Jan 14, 2016
- AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L.
- Xiaowei WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Takafumi KINUTA

Person

Patents Grantslast 30 patents

Substrate cleaning solution, and using the same, method for manufac...

Substrate processing method

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Void forming composition, semiconductor device provided with voids...

Composition for forming topcoat layer and resist pattern formation...

Patents Applicationslast 30 patents

SUBSTRATE SURFACE TREATING SOLUTION, AND USING THE SAME, METHOD FOR...

SUBSTRATE CLEANING SOLUTION, AND USING THE SAME, METHOD FOR MANUFAC...

REPLACEMENT LIQUID OF LIQUID FILLING BETWEEN RESIST PATTERNS, AND M...

SUBSTRATE PROCESSING METHOD

SUBSTRATE CLEANING SOLUTION, AND USING THE SAME, METHOD FOR MANUFAC...

SUBSTRATE CLEANING SOLUTION AND METHOD FOR MANUFACTURING DEVICE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SACRIFICIAL FILM COMPOSITION, METHOD FOR PREPARING SAME, SEMICONDUC...

VOID FORMING COMPOSITION, SEMICONDUCTOR DEVICE PROVIDED WITH VOIDS...

COMPOSITION FOR FORMING TOPCOAT LAYER AND RESIST PATTERN FORMATION...