Takafumi MATSUHASHI

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system, substrate processing method, and contr...
- Patent number 12,062,559
- Issue date Aug 13, 2024
- Tokyo Electron Limited
- Takafumi Matsuhashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus, substrate transfer method, a...
- Patent number 11,908,712
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Toshiharu Hirata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and substrate transfer method
- Patent number 11,127,615
- Issue date Sep 21, 2021
- Tokyo Electron Limited
- Takafumi Matsuhashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate processing method, and contr...
- Patent number 11,086,286
- Issue date Aug 10, 2021
- Tokyo Electron Limited
- Toshiharu Hirata
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM, CONTROL DEVICE, AND SUBSTRATE TRANSFER...
- Publication number 20240213064
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Minoru NAGASAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND CONTR...
- Publication number 20220148898
- Publication date May 12, 2022
- TOKYO ELECTRON LIMITED
- Takafumi Matsuhashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, SUBSTRATE TRANSFER METHOD, A...
- Publication number 20220093425
- Publication date Mar 24, 2022
- TOKYO ELECTRON LIMITED
- Toshiharu Hirata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND CONTR...
- Publication number 20200012254
- Publication date Jan 9, 2020
- TOKYO ELECTRON LIMITED
- Toshiharu HIRATA
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER METHOD
- Publication number 20200013654
- Publication date Jan 9, 2020
- TOKYO ELECTRON LIMITED
- Takafumi Matsuhashi
- H01 - BASIC ELECTRIC ELEMENTS