TREA

Takafumi Matsumoto

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Patents Applicationslast 30 patents

  • Information Patent Application

    Deposition apparatus and deposition method
    • Publication number 20080011602
    • Publication date Jan 17, 2008
    • Seiko Epson Corporation & ULVAC, Inc.
    • Hidenobu Ota
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...