Takafumi Miyaharu

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Imprint method, imprint apparatus, and article manufacturing method
- Patent number 12,153,343
- Issue date Nov 26, 2024
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method of manufacturing ar...
- Patent number 12,072,638
- Issue date Aug 27, 2024
- Canon Kabushiki Kaisha
- Kazuki Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection apparatus, imprint apparatus, and article manufa...
- Patent number 12,023,850
- Issue date Jul 2, 2024
- Canon Kabushiki Kaisha
- Tomokazu Taki
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Exposure apparatus, exposure method, and method of manufacturing ar...
- Patent number 11,835,869
- Issue date Dec 5, 2023
- Canon Kabushiki Kaisha
- Kazuki Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, imprinting method, and product manufacturing method
- Patent number 11,656,547
- Issue date May 23, 2023
- Canon Kabushiki Kaisha
- Naoki Murasato
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus, imprinting method, and method for manufacturing...
- Patent number 11,204,548
- Issue date Dec 21, 2021
- Canon Kabushiki Kaisha
- Kazuhiro Sato
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Illumination apparatus, optical apparatus, imprint apparatus, proje...
- Patent number 10,761,316
- Issue date Sep 1, 2020
- Canon Kabushiki Kaisha
- Takafumi Miyaharu
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Exposure apparatus and article manufacturing method
- Patent number 10,754,255
- Issue date Aug 25, 2020
- Canon Kabushiki Kaisha
- Takafumi Miyaharu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, imprint method, and method for producing article
- Patent number 10,642,171
- Issue date May 5, 2020
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Position detector, position detection method, imprint apparatus, an...
- Patent number 10,634,995
- Issue date Apr 28, 2020
- Canon Kabushiki Kaisha
- Ken Minoda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Position detector, position detection method, imprint apparatus, an...
- Patent number 10,613,434
- Issue date Apr 7, 2020
- Canon Kabushiki Kaisha
- Ken Minoda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus and method for producing article
- Patent number 10,386,737
- Issue date Aug 20, 2019
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Detection apparatus, imprint apparatus, and method of manufacturing...
- Patent number 9,595,447
- Issue date Mar 14, 2017
- Canon Kabushiki Kaisha
- Hiroshi Inada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Detection apparatus, lithography apparatus and method of manufactur...
- Patent number 9,594,315
- Issue date Mar 14, 2017
- Canon Kabushiki Kaisha
- Takafumi Miyaharu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method of manufacturing device
- Patent number 8,497,978
- Issue date Jul 30, 2013
- Canon Kabushiki Kaisha
- Takafumi Miyaharu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 8,253,931
- Issue date Aug 28, 2012
- Canon Kabushiki Kaisha
- Takafumi Miyaharu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and device fabrication method
- Patent number 8,013,976
- Issue date Sep 6, 2011
- Canon Kabushiki Kaisha
- Takafumi Miyaharu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and exposure method
- Patent number 7,671,967
- Issue date Mar 2, 2010
- Canon Kabushiki Kaisha
- Takafumi Miyaharu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING AR...
- Publication number 20240061350
- Publication date Feb 22, 2024
- Canon Kabushiki Kaisha
- KAZUKI OTA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURI...
- Publication number 20230375956
- Publication date Nov 23, 2023
- Canon Kabushiki Kaisha
- RYO NAKAYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20230194981
- Publication date Jun 22, 2023
- Canon Kabushiki Kaisha
- TATSUYA HAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING AR...
- Publication number 20230185205
- Publication date Jun 15, 2023
- Canon Kabushiki Kaisha
- KAZUKI OTA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND ARTICLE MANUFA...
- Publication number 20230031701
- Publication date Feb 2, 2023
- Canon Kabushiki Kaisha
- Tomokazu Taki
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
DETECTION APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURI...
- Publication number 20220236650
- Publication date Jul 28, 2022
- Canon Kabushiki Kaisha
- Ryo Nakayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, IMPRINTING METHOD, AND PRODUCT MANUFACTURING METHOD
- Publication number 20200310247
- Publication date Oct 1, 2020
- Canon Kabushiki Kaisha
- Naoki Murasato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20200019066
- Publication date Jan 16, 2020
- Canon Kabushiki Kaisha
- Takafumi Miyaharu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, IMPRINTING METHOD, AND METHOD FOR MANUFACTURING...
- Publication number 20180149969
- Publication date May 31, 2018
- Canon Kabushiki Kaisha
- Kazuhiro Sato
- B82 - NANO-TECHNOLOGY
Information Patent Application
POSITION DETECTOR, POSITION DETECTION METHOD, IMPRINT APPARATUS, AN...
- Publication number 20170329217
- Publication date Nov 16, 2017
- Canon Kabushiki Kaisha
- Ken Minoda
- G01 - MEASURING TESTING
Information Patent Application
ILLUMINATION APPARATUS, OPTICAL APPARATUS, IMPRINT APPARATUS, PROJE...
- Publication number 20170285331
- Publication date Oct 5, 2017
- Canon Kabushiki Kaisha
- Takafumi Miyaharu
- G02 - OPTICS
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD FOR PRODUCING ARTICLE
- Publication number 20160363874
- Publication date Dec 15, 2016
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS AND METHOD FOR PRODUCING ARTICLE
- Publication number 20160363875
- Publication date Dec 15, 2016
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
DETECTION APPARATUS, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING...
- Publication number 20150235880
- Publication date Aug 20, 2015
- Canon Kabushiki Kaisha
- Hiroshi Inada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DETECTION APPARATUS, LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTUR...
- Publication number 20150062553
- Publication date Mar 5, 2015
- Canon Kabushiki Kaisha
- Takafumi MIYAHARU
- G01 - MEASURING TESTING
Information Patent Application
DETECTOR, IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20130221556
- Publication date Aug 29, 2013
- Canon Kabushiki Kaisha
- Takafumi Miyaharu
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
- Publication number 20110001946
- Publication date Jan 6, 2011
- Canon Kabushiki Kaisha
- Takafumi Miyaharu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100112469
- Publication date May 6, 2010
- Canon Kabushiki Kaisha
- Takafumi Miyaharu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE FABRICATION METHOD
- Publication number 20080291421
- Publication date Nov 27, 2008
- Canon Kabushiki Kaisha
- Takafumi Miyaharu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Measuring apparatus and exposure apparatus having the same
- Publication number 20060238736
- Publication date Oct 26, 2006
- Canon Kabushiki Kaisha
- Takafumi Miyaharu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Takafumi Miyaharu

Person

Patents Grantslast 30 patents

Imprint method, imprint apparatus, and article manufacturing method

Exposure apparatus, exposure method, and method of manufacturing ar...

Position detection apparatus, imprint apparatus, and article manufa...

Exposure apparatus, exposure method, and method of manufacturing ar...

Imprint apparatus, imprinting method, and product manufacturing method

Imprint apparatus, imprinting method, and method for manufacturing...

Illumination apparatus, optical apparatus, imprint apparatus, proje...

Exposure apparatus and article manufacturing method

Imprint apparatus, imprint method, and method for producing article

Position detector, position detection method, imprint apparatus, an...

Position detector, position detection method, imprint apparatus, an...

Imprint apparatus and method for producing article

Detection apparatus, imprint apparatus, and method of manufacturing...

Detection apparatus, lithography apparatus and method of manufactur...

Exposure apparatus and method of manufacturing device

Exposure apparatus and device manufacturing method

Exposure apparatus, exposure method, and device fabrication method

Exposure apparatus and exposure method

Patents Applicationslast 30 patents

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING AR...

DETECTION APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURI...

IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING AR...

POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND ARTICLE MANUFA...

DETECTION APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURI...

IMPRINT APPARATUS, IMPRINTING METHOD, AND PRODUCT MANUFACTURING METHOD

EXPOSURE APPARATUS AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS, IMPRINTING METHOD, AND METHOD FOR MANUFACTURING...

POSITION DETECTOR, POSITION DETECTION METHOD, IMPRINT APPARATUS, AN...

ILLUMINATION APPARATUS, OPTICAL APPARATUS, IMPRINT APPARATUS, PROJE...

IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD FOR PRODUCING ARTICLE

IMPRINT APPARATUS AND METHOD FOR PRODUCING ARTICLE

DETECTION APPARATUS, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING...

DETECTION APPARATUS, LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTUR...

DETECTOR, IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE FABRICATION METHOD

Measuring apparatus and exposure apparatus having the same