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Takafumi NIWA
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Koshi City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Coating film forming method, coating film forming apparatus, and st...
Patent number
10,672,606
Issue date
Jun 2, 2020
Tokyo Electron Limited
Kousuke Yoshihara
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Auxiliary exposure apparatus and exposure amount distribution acqui...
Patent number
10,642,168
Issue date
May 5, 2020
Tokyo Electron Limited
Hideaki Kashiwagi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Coating film forming method, coating film forming apparatus, and st...
Patent number
10,068,763
Issue date
Sep 4, 2018
Tokyo Electron Limited
Kousuke Yoshihara
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Liquid processing method, memory medium and liquid processing appar...
Patent number
9,972,512
Issue date
May 15, 2018
Tokyo Electron Limited
Akiko Kai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Liquid processing method, memory medium and liquid processing appar...
Patent number
9,786,488
Issue date
Oct 10, 2017
Tokyo Electron Limited
Akiko Kai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method
Patent number
8,367,308
Issue date
Feb 5, 2013
Tokyo Electron Limited
Hiroshi Nakamura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate treatment method
Patent number
8,110,325
Issue date
Feb 7, 2012
Tokyo Electron Limited
Takafumi Niwa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
Publication number
20240248413
Publication date
Jul 25, 2024
TOKYO ELECTRON LIMITED
Takeshi SHIMOAOKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND RE...
Publication number
20240200195
Publication date
Jun 20, 2024
TOKYO ELECTRON LIMITED
Takafumi Niwa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230098105
Publication date
Mar 30, 2023
TOKYO ELECTRON LIMITED
Yuichiro Inatomi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230085449
Publication date
Mar 16, 2023
TOKYO ELECTRON LIMITED
Takafumi Niwa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE LIQUID PROCESSING METHOD, SUBSTRATE LIQUID PROCESSING APP...
Publication number
20220290302
Publication date
Sep 15, 2022
TOKYO ELECTRON LIMITED
Kazutoshi Iwai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20220251709
Publication date
Aug 11, 2022
TOKYO ELECTRON LIMITED
Takafumi Niwa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...
Publication number
20210317581
Publication date
Oct 14, 2021
TOKYO ELECTRON LIMITED
Takafumi Niwa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Coating Film Forming Method, Coating Film Forming Apparatus, and St...
Publication number
20180350594
Publication date
Dec 6, 2018
TOKYO ELECTRON LIMITED
Kousuke YOSHIHARA
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
AUXILIARY EXPOSURE APPARATUS AND EXPOSURE AMOUNT DISTRIBUTION ACQUI...
Publication number
20180095370
Publication date
Apr 5, 2018
TOKYO ELECTRON LIMITED
Hideaki KASHIWAGI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIQUID PROCESSING METHOD, MEMORY MEDIUM AND LIQUID PROCESSING APPAR...
Publication number
20180019112
Publication date
Jan 18, 2018
TOKYO ELECTRON LIMITED
Akiko KAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COATING FILM FORMING METHOD, COATING FILM FORMING APPARATUS, AND ST...
Publication number
20170140929
Publication date
May 18, 2017
TOKYO ELECTRON LIMITED
Kousuke YOSHIHARA
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
LIQUID PROCESSING METHOD, MEMORY MEDIUM AND LIQUID PROCESSING APPAR...
Publication number
20160096203
Publication date
Apr 7, 2016
TOKYO ELECTRON LIMITED
Akiko Kai
B08 - CLEANING
Information
Patent Application
DEVELOPING METHOD AND APPARATUS USING ORGANIC-SOLVENT CONTAINING DE...
Publication number
20120218531
Publication date
Aug 30, 2012
TOKYO ELECTRON LIMITED
Kouichi Hontake
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TREATMENT METHOD
Publication number
20110200923
Publication date
Aug 18, 2011
TOKYO ELECTRON LIMITED
Takafumi NIWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20110200949
Publication date
Aug 18, 2011
TOKYO ELECTRON LIMITED
Hiroshi Nakamura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate Processing Method
Publication number
20090004607
Publication date
Jan 1, 2009
Takeshi Shimoaoki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY