Takafumi Nogami

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Cleaning method
- Patent number 11,488,813
- Issue date Nov 1, 2022
- Tokyo Electron Limited
- Satoshi Itoh
- B08 - CLEANING
Information Patent Grant
Plasma processing apparatus
- Patent number 10,930,477
- Issue date Feb 23, 2021
- Tokyo Electron Limited
- Takafumi Nogami
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FORMING SILICON NITRIDE FILM
- Publication number 20240240307
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Takafumi NOGAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20240170267
- Publication date May 23, 2024
- Tokyo Electron Limited
- Yoshiki NAKANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240047194
- Publication date Feb 8, 2024
- Tokyo Electron Limited
- Kenichi KOTE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230317421
- Publication date Oct 5, 2023
- TOKYO ELECTRON LIMITED
- Takafumi NOGAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230135618
- Publication date May 4, 2023
- TOKYO ELECTRON LIMITED
- Hiroshi HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING METHOD
- Publication number 20210249240
- Publication date Aug 12, 2021
- TOKYO ELECTRON LIMITED
- Satoshi ITOH
- B08 - CLEANING
Information Patent Application
Plasma Processing Apparatus
- Publication number 20190180989
- Publication date Jun 13, 2019
- TOKYO ELECTRON LIMITED
- Takafumi NOGAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPORT APPARATUS FOR PLASMA ADJUSTMENT, METHOD FOR ADJUSTING PLASM...
- Publication number 20170372877
- Publication date Dec 28, 2017
- TOKYO ELECTRON LIMITED
- Takafumi NOGAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PLASMA PROCESSING APPARATUS AND MICROWAVE PLASMA PROCESSI...
- Publication number 20170358835
- Publication date Dec 14, 2017
- TOKYO ELECTRON LIMITED
- Toshio Nakanishi
- G02 - OPTICS

Takafumi Nogami

Person

Patents Grantslast 30 patents

Cleaning method

Plasma processing apparatus

Patents Applicationslast 30 patents

METHOD OF FORMING SILICON NITRIDE FILM

CLEANING METHOD AND PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

CLEANING METHOD

Plasma Processing Apparatus

SUPPORT APPARATUS FOR PLASMA ADJUSTMENT, METHOD FOR ADJUSTING PLASM...

MICROWAVE PLASMA PROCESSING APPARATUS AND MICROWAVE PLASMA PROCESSI...