Takafumi Okabe

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for inspecting pattern defects
- Patent number 8,639,019
- Issue date Jan 28, 2014
- Hitachi High-Technologies Corporation
- Kaoru Sakai
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting pattern defects
- Patent number 8,275,190
- Issue date Sep 25, 2012
- Hitachi High-Technologies Corporation
- Kaoru Sakai
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting a pattern formed on a substrate
- Patent number 8,253,934
- Issue date Aug 28, 2012
- Hitachi High-Technologies Corporation
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspection method and its apparatus
- Patent number 8,090,187
- Issue date Jan 3, 2012
- Hitachi, Ltd.
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspecting pattern defects
- Patent number 8,005,292
- Issue date Aug 23, 2011
- Hitachi High-Technologies Corporation
- Kaoru Sakai
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspection method and its apparatus
- Patent number 7,949,178
- Issue date May 24, 2011
- Hitachi High-Technologies Corporation
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspecting pattern defects
- Patent number 7,903,249
- Issue date Mar 8, 2011
- Hitachi, Ltd.
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and its apparatus, inspection system
- Patent number 7,869,966
- Issue date Jan 11, 2011
- Hitachi, Ltd.
- Takafumi Okabe
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting pattern defects
- Patent number 7,792,352
- Issue date Sep 7, 2010
- Hitachi High-Technologies Corporation
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection method and its apparatus
- Patent number 7,711,178
- Issue date May 4, 2010
- Hitachi, Ltd.
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspecting a pattern formed on a substrate
- Patent number 7,646,477
- Issue date Jan 12, 2010
- Hitachi High-Technologies Corporation
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting defects
- Patent number 7,508,973
- Issue date Mar 24, 2009
- Hitachi High-Technologies Corporation
- Takafumi Okabe
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspecting pattern defects
- Patent number 7,489,395
- Issue date Feb 10, 2009
- Hitachi High-Technologies Corporation, Ltd.
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspection method and its apparatus
- Patent number 7,433,508
- Issue date Oct 7, 2008
- Hitachi High-Technologies Corporation
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspecting pattern defects
- Patent number 7,388,979
- Issue date Jun 17, 2008
- Hitachi High-Technologies Corporation
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspecting defects and a system for inspec...
- Patent number 7,372,561
- Issue date May 13, 2008
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Image alignment method, comparative inspection method, and comparat...
- Patent number 7,333,677
- Issue date Feb 19, 2008
- Hitachi, Ltd.
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspecting defects
- Patent number 7,330,248
- Issue date Feb 12, 2008
- Hitachi, Ltd.
- Kaoru Sakai
- G01 - MEASURING TESTING
Information Patent Grant
Defect detection method and its apparatus
- Patent number 7,142,708
- Issue date Nov 28, 2006
- Hitachi, Ltd.
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image alignment method, comparative inspection method, and comparat...
- Patent number 7,127,126
- Issue date Oct 24, 2006
- Hitachi, Ltd.
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspecting pattern defects
- Patent number 7,110,105
- Issue date Sep 19, 2006
- Hitachi Ltd.
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Grant
Image alignment method, comparative inspection method, and comparat...
- Patent number 7,020,350
- Issue date Mar 28, 2006
- Hitachi, Ltd.
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspecting pattern defects
- Patent number 6,927,847
- Issue date Aug 9, 2005
- Hitachi High-Technologies Corporation
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting a pattern formed on a substrate
- Patent number 6,900,888
- Issue date May 31, 2005
- Hitachi High-Technologies Corporation
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting defects
- Patent number 6,879,392
- Issue date Apr 12, 2005
- Hitachi, Ltd.
- Kaoru Sakai
- G01 - MEASURING TESTING
Information Patent Grant
Method for manufacturing semiconductor devices and method and its a...
- Patent number 6,841,403
- Issue date Jan 11, 2005
- Hitachi, Ltd.
- Maki Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method and its apparatus, inspection system
- Patent number 6,799,130
- Issue date Sep 28, 2004
- Hitachi, Ltd.
- Takafumi Okabe
- G01 - MEASURING TESTING
Information Patent Grant
Method for manufacturing semiconductor devices and method and its a...
- Patent number 6,797,526
- Issue date Sep 28, 2004
- Hitachi, Ltd.
- Maki Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microscopic defect inspection apparatus and method thereof, as well...
- Patent number 6,566,671
- Issue date May 20, 2003
- Hitachi, Ltd.
- Atsushi Yoshida
- G01 - MEASURING TESTING
Information Patent Grant
Three-dimensional vision system
- Patent number 4,731,853
- Issue date Mar 15, 1988
- Hitachi, Ltd.
- Seiji Hata
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR INSPECTING PATTERN DEFECTS
- Publication number 20130004057
- Publication date Jan 3, 2013
- Kaoru Sakai
- G01 - MEASURING TESTING
Information Patent Application
PATTERN INSPECTION METHOD AND ITS APPARATUS
- Publication number 20120076396
- Publication date Mar 29, 2012
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING PATTERN DEFECTS
- Publication number 20110304725
- Publication date Dec 15, 2011
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING PATTERN DEFECTS
- Publication number 20100328446
- Publication date Dec 30, 2010
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN INSPECTION METHOD AND ITS APPARATUS
- Publication number 20100172570
- Publication date Jul 8, 2010
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method And Apparatus For Inspecting A Pattern Formed On A Substrate
- Publication number 20100104173
- Publication date Apr 29, 2010
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Application
PATTERN INSPECTION METHOD AND ITS APPARATUS
- Publication number 20090226076
- Publication date Sep 10, 2009
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN INSPECTION METHOD AND ITS APPARATUS
- Publication number 20090169093
- Publication date Jul 2, 2009
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method And Apparatus For Inspecting Pattern Defects
- Publication number 20090153840
- Publication date Jun 18, 2009
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Application
Pattern inspection method and its apparatus
- Publication number 20090003682
- Publication date Jan 1, 2009
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING PATTERN DEFECTS
- Publication number 20080232674
- Publication date Sep 25, 2008
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN INSPECTION METHOD AND ITS APPARATUS
- Publication number 20080031511
- Publication date Feb 7, 2008
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Image Alignment Method, Comparative Inspection Method, and Comparat...
- Publication number 20070133863
- Publication date Jun 14, 2007
- Hitachi, Ltd
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Image alignment method, comparative inspection method, and comparat...
- Publication number 20070036422
- Publication date Feb 15, 2007
- Hitachi, Ltd
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for inspecting pattern defects
- Publication number 20070002318
- Publication date Jan 4, 2007
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting pattern defects
- Publication number 20050264800
- Publication date Dec 1, 2005
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting defects and a system for inspec...
- Publication number 20050264802
- Publication date Dec 1, 2005
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Application
Image alignment method, comparative inspection method, and comparat...
- Publication number 20050220333
- Publication date Oct 6, 2005
- Hitachi, Ltd
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for inspecting a pattern formed on a substrate
- Publication number 20050206888
- Publication date Sep 22, 2005
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting defects
- Publication number 20050168730
- Publication date Aug 4, 2005
- Hitachi, Ltd
- Kaoru Sakai
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting pattern defects
- Publication number 20050147287
- Publication date Jul 7, 2005
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Inspection method and its apparatus, inspection system
- Publication number 20050033538
- Publication date Feb 10, 2005
- Hitachi, Ltd
- Takafumi Okabe
- G01 - MEASURING TESTING
Information Patent Application
Pattern inspection method and its apparatus
- Publication number 20040240723
- Publication date Dec 2, 2004
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method of inspecting defects
- Publication number 20040228515
- Publication date Nov 18, 2004
- Takafumi Okabe
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for inspecting a pattern formed on a substrate
- Publication number 20040124363
- Publication date Jul 1, 2004
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Application
Pattern inspection method and its apparatus
- Publication number 20030179921
- Publication date Sep 25, 2003
- Kaoru Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method for manufacturing semiconductor devices and method and its a...
- Publication number 20030138978
- Publication date Jul 24, 2003
- Hitachi, Ltd
- Maki Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for manufacturing semiconductor devices and method and its a...
- Publication number 20030054573
- Publication date Mar 20, 2003
- Hitachi, Ltd
- Maki Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection method and its apparatus, inspection system
- Publication number 20030050761
- Publication date Mar 13, 2003
- Takafumi Okabe
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting pattern defects
- Publication number 20030048439
- Publication date Mar 13, 2003
- Minoru Yoshida
- G01 - MEASURING TESTING

Takafumi Okabe

Person

Patents Grantslast 30 patents

Method and apparatus for inspecting pattern defects

Method and apparatus for inspecting pattern defects

Method and apparatus for inspecting a pattern formed on a substrate

Pattern inspection method and its apparatus

Method and apparatus for inspecting pattern defects

Pattern inspection method and its apparatus

Method and apparatus for inspecting pattern defects

Inspection method and its apparatus, inspection system

Method and apparatus for inspecting pattern defects

Pattern inspection method and its apparatus

Method and apparatus for inspecting a pattern formed on a substrate

Method of inspecting defects

Method and apparatus for inspecting pattern defects

Pattern inspection method and its apparatus

Method and apparatus for inspecting pattern defects

Method and apparatus for inspecting defects and a system for inspec...

Image alignment method, comparative inspection method, and comparat...

Method and apparatus for inspecting defects

Defect detection method and its apparatus

Image alignment method, comparative inspection method, and comparat...

Method and apparatus for inspecting pattern defects

Image alignment method, comparative inspection method, and comparat...

Method and apparatus for inspecting pattern defects

Method and apparatus for inspecting a pattern formed on a substrate

Method and apparatus for inspecting defects

Method for manufacturing semiconductor devices and method and its a...

Inspection method and its apparatus, inspection system

Method for manufacturing semiconductor devices and method and its a...

Microscopic defect inspection apparatus and method thereof, as well...

Three-dimensional vision system

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR INSPECTING PATTERN DEFECTS

PATTERN INSPECTION METHOD AND ITS APPARATUS

METHOD AND APPARATUS FOR INSPECTING PATTERN DEFECTS

METHOD AND APPARATUS FOR INSPECTING PATTERN DEFECTS

PATTERN INSPECTION METHOD AND ITS APPARATUS

Method And Apparatus For Inspecting A Pattern Formed On A Substrate

PATTERN INSPECTION METHOD AND ITS APPARATUS

PATTERN INSPECTION METHOD AND ITS APPARATUS

Method And Apparatus For Inspecting Pattern Defects

Pattern inspection method and its apparatus

METHOD AND APPARATUS FOR INSPECTING PATTERN DEFECTS

PATTERN INSPECTION METHOD AND ITS APPARATUS

Image Alignment Method, Comparative Inspection Method, and Comparat...

Image alignment method, comparative inspection method, and comparat...

Method and apparatus for inspecting pattern defects

Method and apparatus for inspecting pattern defects

Method and apparatus for inspecting defects and a system for inspec...

Image alignment method, comparative inspection method, and comparat...

Method and apparatus for inspecting a pattern formed on a substrate

Method and apparatus for inspecting defects

Method and apparatus for inspecting pattern defects

Inspection method and its apparatus, inspection system

Pattern inspection method and its apparatus

Method of inspecting defects

Method and apparatus for inspecting a pattern formed on a substrate

Pattern inspection method and its apparatus

Method for manufacturing semiconductor devices and method and its a...

Method for manufacturing semiconductor devices and method and its a...

Inspection method and its apparatus, inspection system

Method and apparatus for inspecting pattern defects