Takafumi OKI

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Kyoto-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure device substrate processing apparatus, exposure method of...
- Patent number 10,444,636
- Issue date Oct 15, 2019
- SCREEN Holdings Co., Ltd.
- Tomohiro Matsuo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure device, substrate processing apparatus, exposure method of...
- Patent number 10,401,736
- Issue date Sep 3, 2019
- SCREEN Holdings Co., Ltd.
- Tomohiro Matsuo
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD OF...
- Publication number 20180253012
- Publication date Sep 6, 2018
- SCREEN Holdings Co., Ltd.
- Tomohiro MATSUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD OF...
- Publication number 20180253011
- Publication date Sep 6, 2018
- SCREEN Holdings Co., Ltd.
- Tomohiro MATSUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY