Takafumi Ota

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Temperature regulating apparatus, exposure system, and device manuf...
- Patent number 8,131,404
- Issue date Mar 6, 2012
- Canon Kabushiki Kaisha
- Yoshiyuki Okada
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE REGULATING APPARATUS, EXPOSURE SYSTEM, AND DEVICE MANUF...
- Publication number 20100004796
- Publication date Jan 7, 2010
- Canon Kabushiki Kaisha
- Yoshiyuki Okada
- G05 - CONTROLLING REGULATING