Takafumi Tsuchiya

Person

Tosu-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate liquid processing apparatus
- Patent number 11,869,780
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Takahiro Kawazu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 11,594,430
- Issue date Feb 28, 2023
- Tokyo Electron Limited
- Takafumi Tsuchiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 10,928,732
- Issue date Feb 23, 2021
- Tokyo Electron Limited
- Hironobu Hyakutake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 10,458,010
- Issue date Oct 29, 2019
- Tokyo Electron Limited
- Hironobu Hyakutake
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 9,305,818
- Issue date Apr 5, 2016
- Tokyo Electron Limited
- Yuji Kamikawa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing apparatus
- Patent number 8,851,819
- Issue date Oct 7, 2014
- Tokyo Electron Limited
- Yuji Kamikawa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Treating apparatus, treating method and recording medium
- Patent number 8,790,469
- Issue date Jul 29, 2014
- Tokyo Electron Limited
- Takafumi Tsuchiya
- B08 - CLEANING
Information Patent Grant
Substrate processing system and substrate transfer method
- Patent number 8,079,797
- Issue date Dec 20, 2011
- Tokyo Electron Limited
- Osamu Tanaka
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND RECOR...
- Publication number 20230268213
- Publication date Aug 24, 2023
- TOKYO ELECTRON LIMITED
- Takafumi Tsuchiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20190080937
- Publication date Mar 14, 2019
- TOKYO ELECTRON LIMITED
- Takafumi Tsuchiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND RECORDING MEDIUM
- Publication number 20190080938
- Publication date Mar 14, 2019
- TOKYO ELECTRON LIMITED
- Takahiro Kawazu
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20170037499
- Publication date Feb 9, 2017
- TOKYO ELECTRON LIMITED
- Hironobu Hyakutake
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20170025268
- Publication date Jan 26, 2017
- TOKYO ELECTRON LIMITED
- Hironobu Hyakutake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140356106
- Publication date Dec 4, 2014
- TOKYO ELECTRON LIMITED
- Yuji KAMIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100215461
- Publication date Aug 26, 2010
- TOKYO ELECTRON LIMITED
- Yuji KAMIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATING APPARATUS, TREATING METHOD AND RECORDING MEDIUM
- Publication number 20100163077
- Publication date Jul 1, 2010
- TOKYO ELECTRON LIMITED
- Takafumi TSUCHIYA
- B08 - CLEANING
Information Patent Application
Substrate processing system and substrate transfer method
- Publication number 20090097950
- Publication date Apr 16, 2009
- TOKYO ELECTRON LIMITED
- Osamu Tanaka
- H01 - BASIC ELECTRIC ELEMENTS

Takafumi Tsuchiya

Person

Patents Grantslast 30 patents

Substrate liquid processing apparatus

Substrate liquid processing apparatus, substrate liquid processing...

Substrate liquid processing apparatus, substrate liquid processing...

Substrate liquid processing apparatus, substrate liquid processing...

Substrate processing apparatus

Substrate processing apparatus

Treating apparatus, treating method and recording medium

Substrate processing system and substrate transfer method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND RECOR...

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

SUBSTRATE LIQUID PROCESSING APPARATUS AND RECORDING MEDIUM

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

TREATING APPARATUS, TREATING METHOD AND RECORDING MEDIUM

Substrate processing system and substrate transfer method