Takaharu MIURA

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Yamato-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and methods utilizing plural mask and object sta...
- Patent number 6,894,763
- Issue date May 17, 2005
- Nikon Corporation
- Seiro Murakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas-actuated stages including reaction-force-canceling mechanisms f...
- Patent number 6,674,085
- Issue date Jan 6, 2004
- Nikin Corporation
- Takaharu Miura
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
CHAMBER SYSTEM AND HEAT-INSULATING PANEL
- Publication number 20150047806
- Publication date Feb 19, 2015
- Nikon Corporation
- Takaharu MIURA
- F24 - HEATING RANGES VENTILATING
Information Patent Application
Charged-particle-beam microlithography systems that detect and offs...
- Publication number 20040113101
- Publication date Jun 17, 2004
- NIKON CORPORATION
- Shiwen Li
- B82 - NANO-TECHNOLOGY
Information Patent Application
Exposure apparatus and methods utilizing plural mask and object sta...
- Publication number 20030218730
- Publication date Nov 27, 2003
- NIKON CORPORATION
- Seiro Murakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Non-contacting holding devices for an optical component, and optica...
- Publication number 20030213889
- Publication date Nov 20, 2003
- NIKON CORPORATION
- Takaharu Miura
- G02 - OPTICS
Information Patent Application
Gas-actuated stages including reaction-force-canceling mechanisms f...
- Publication number 20020085192
- Publication date Jul 4, 2002
- NIKON CORPORATION
- Takaharu Miura
- B82 - NANO-TECHNOLOGY