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Takaharu Yamada
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Kamikyo-ku, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus
Patent number
7,497,912
Issue date
Mar 3, 2009
Dainippon Screen Mfg. Co., Ltd.
Yasufumi Koyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and method of transporting substrate...
Patent number
7,317,961
Issue date
Jan 8, 2008
Dainippon Screen Mfg. Co., Ltd.
Kenji Hashinoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
7,229,240
Issue date
Jun 12, 2007
Dainippon Screen Mfg. Co., Ltd.
Kenji Hashinoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of transporting and processing substrates in substrate proce...
Patent number
7,069,099
Issue date
Jun 27, 2006
Dainippon Screen Mfg. Co., Ltd.
Kenji Hashinoki
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Substrate processing apparatus and method of transporting substrate...
Publication number
20060195216
Publication date
Aug 31, 2006
Dainippon Screen Mfg. Co., Ltd.
Kenji Hashinoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus
Publication number
20050061248
Publication date
Mar 24, 2005
Dainippon Screen Mfg. Co., Ltd.
Yasufumi Koyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus and substrate processing method
Publication number
20050061240
Publication date
Mar 24, 2005
Dainippon Screen Mfg. Co., Ltd.
Kenji Hashinoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus and method of transporting substrate...
Publication number
20040182318
Publication date
Sep 23, 2004
Dainippon Screen Mfg. Co., Ltd.
Kenji Hashinoki
H01 - BASIC ELECTRIC ELEMENTS