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Takahide Iida
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Obu, JP
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last 30 patents
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Patent Grant
Method and device for detecting defects of patterns in microelectro...
Patent number
4,760,265
Issue date
Jul 26, 1988
Kabushiki Kaisha Toyoda Jidoshokki Seisakusho
Akihiro Yoshida
G01 - MEASURING TESTING