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Etching method
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Patent number 11,404,283
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Issue date Aug 2, 2022
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Tokyo Electron Limited
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Shigeru Tahara
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Workpiece processing method
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Patent number 11,049,730
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Issue date Jun 29, 2021
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Tokyo Electron Limited
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Yu Nagatomo
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H01 - BASIC ELECTRIC ELEMENTS
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Etching method
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Patent number 10,770,308
-
Issue date Sep 8, 2020
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Tokyo Electron Limited
-
Shigeru Tahara
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H01 - BASIC ELECTRIC ELEMENTS
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Substrate processing method
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Patent number 10,373,846
-
Issue date Aug 6, 2019
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Tokyo Electron Limited
-
Takahiko Kato
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma processing apparatus
-
Patent number 9,425,028
-
Issue date Aug 23, 2016
-
Tokyo Electron Limited
-
Yusei Kuwabara
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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