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Takahiko Mitsui
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Annaka-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for manufacturing semiconductor device and apparatus for man...
Patent number
12,068,165
Issue date
Aug 20, 2024
OKAMOTO MACHINE TOOL WORKS, LTD.
Eiichi Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dressing apparatus and polishing apparatus
Patent number
11,980,997
Issue date
May 14, 2024
OKAMOTO MACHINE TOOL WORKS, LTD.
Takahiko Mitsui
B24 - GRINDING POLISHING
Information
Patent Grant
Grinding method of composite substrate including resin and grinding...
Patent number
11,745,299
Issue date
Sep 5, 2023
OKAMOTO MACHINE TOOL WORKS, LTD.
Eiichi Yamamoto
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for manufacturing semiconductor device
Patent number
11,735,411
Issue date
Aug 22, 2023
OKAMOTO MACHINE TOOL WORKS, LTD.
Eiichi Yamamoto
B24 - GRINDING POLISHING
Information
Patent Grant
Electrostatic attachment chuck, method for manufacturing the same,...
Patent number
10,964,576
Issue date
Mar 30, 2021
OKAMOTO MACHINE TOOL WORKS, LTD.
Eiichi Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor apparatus
Patent number
10,763,171
Issue date
Sep 1, 2020
OKAMOTO MACHINE TOOL WORKS, LTD.
Eiichi Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE GRINDING DEVICE AND SUBSTRATE GRINDING METHOD
Publication number
20230079520
Publication date
Mar 16, 2023
OKAMOTO MACHINE TOOL WORKS, LTD.
Satoru IDE
B24 - GRINDING POLISHING
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND APPARATUS FOR MAN...
Publication number
20220293425
Publication date
Sep 15, 2022
OKAMOTO MACHINE TOOL WORKS, LTD.
Eiichi YAMAMOTO
B24 - GRINDING POLISHING
Information
Patent Application
GRINDING METHOD AND GRINDING APPARATUS
Publication number
20220266419
Publication date
Aug 25, 2022
OKAMOTO MACHINE TOOL WORKS, LTD.
Tsubasa BANDO
B24 - GRINDING POLISHING
Information
Patent Application
DRESSING APPARATUS AND POLISHING APPARATUS
Publication number
20220016742
Publication date
Jan 20, 2022
OKAMOTO MACHINE TOOL WORKS, LTD.
Takahiko MITSUI
B24 - GRINDING POLISHING
Information
Patent Application
GRINDING METHOD OF COMPOSITE SUBSTRATE INCLUDING RESIN AND GRINDING...
Publication number
20200198083
Publication date
Jun 25, 2020
OKAMOTO MACHINE TOOL WORKS, LTD.
Eiichi YAMAMOTO
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE GRINDING DEVICE AND SUBSTRATE GRINDING METHOD
Publication number
20200086450
Publication date
Mar 19, 2020
OKAMOTO MACHINE TOOL WORKS, LTD.
Satoru IDE
B24 - GRINDING POLISHING
Information
Patent Application
METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20200066507
Publication date
Feb 27, 2020
OKAMOTO MACHINE TOOL WORKS, LTD.
Eiichi YAMAMOTO
B24 - GRINDING POLISHING
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20190244858
Publication date
Aug 8, 2019
OKAMOTO MACHINE TOOL WORKS, LTD.
Eiichi YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC ATTACHMENT CHUCK, METHOD FOR MANUFACTURING THE SAME,...
Publication number
20180315635
Publication date
Nov 1, 2018
OKAMOTO MACHINE TOOL WORKS, LTD.
Eiichi YAMAMOTO
B24 - GRINDING POLISHING
Information
Patent Application
Dressing tool, dressing device, dressing method, processing device...
Publication number
20050032467
Publication date
Feb 10, 2005
NIKON CORPORATION
Susumu Hoshino
B24 - GRINDING POLISHING
Information
Patent Application
Chemical-mechanical polishing apparatus, polishing pad and method f...
Publication number
20030168169
Publication date
Sep 11, 2003
Akira Ishikawa
B24 - GRINDING POLISHING