Takahiko Otsu

Follow

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate liquid processing apparatus
- Patent number 11,742,226
- Issue date Aug 29, 2023
- Tokyo Electron Limited
- Takahiko Otsu
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
- Publication number 20200211865
- Publication date Jul 2, 2020
- TOKYO ELECTRON LIMITED
- Takahiko Otsu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190096711
- Publication date Mar 28, 2019
- TOKYO ELECTRON LIMITED
- Hiroki Ohno
- H01 - BASIC ELECTRIC ELEMENTS