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Takahiko Suzuki
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Honjou, JP
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Patents Grants
last 30 patents
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Patent Grant
Inspection apparatus and inspection method
Patent number
8,345,233
Issue date
Jan 1, 2013
Hitachi High-Technologies Corporation
Tadashi Suga
G01 - MEASURING TESTING
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Patent Grant
Inspection apparatus and inspection method
Patent number
8,102,522
Issue date
Jan 24, 2012
Hitachi High-Technologies Corporation
Tadashi Suga
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and method for measuring alignment accuracy, as well as m...
Patent number
7,271,908
Issue date
Sep 18, 2007
Hitachi, Ltd.
Minori Noguchi
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and method for measuring alignment accuracy, as well as m...
Patent number
6,897,956
Issue date
May 24, 2005
Hitachi, Ltd.
Minori Noguchi
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
Publication number
20120140212
Publication date
Jun 7, 2012
Hitachi High-Technologies Corporation
Tadashi Suga
G01 - MEASURING TESTING
Information
Patent Application
Inspection apparatus and inspection method
Publication number
20090262339
Publication date
Oct 22, 2009
Tadashi Suga
G01 - MEASURING TESTING
Information
Patent Application
Apparatus and method for measuring alignment accuracy, as well as m...
Publication number
20050206898
Publication date
Sep 22, 2005
Minori Noguchi
G01 - MEASURING TESTING
Information
Patent Application
Apparatus and method for measuring alignment accuracy, as well as m...
Publication number
20030160960
Publication date
Aug 28, 2003
Minori Noguchi
G01 - MEASURING TESTING