Takahiro Hayashida

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Heating treatment apparatus and heating treatment method
- Patent number 11,842,906
- Issue date Dec 12, 2023
- Tokyo Electron Limited
- Hideaki Iwasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating treatment apparatus and heating treatment method
- Patent number 10,964,564
- Issue date Mar 30, 2021
- Tokyo Electron Limited
- Hideaki Iwasaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, FLUID SUPPLY SYSTEM, AND SUBSTRATE...
- Publication number 20250167010
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Mikio NAKASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240242977
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS M...
- Publication number 20240240859
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Shota UMEZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND FLUID HEATING DEVICE
- Publication number 20240234172
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Takahiro HAYASHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240194496
- Publication date Jun 13, 2024
- TOKYO ELECTRON LIMITED
- Shota UMEZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND FLUID HEATING DEVICE
- Publication number 20240136206
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Takahiro HAYASHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING TREATMENT APPARATUS AND HEATING TREATMENT METHOD
- Publication number 20210183669
- Publication date Jun 17, 2021
- TOKYO ELECTRON LIMITED
- Hideaki Iwasaka
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
HEATING TREATMENT APPARATUS AND HEATING TREATMENT METHOD
- Publication number 20190096716
- Publication date Mar 28, 2019
- TOKYO ELECTRON LIMITED
- Hideaki Iwasaka
- F27 - FURNACES KILNS OVENS RETORTS

Takahiro Hayashida

Person

Patents Grantslast 30 patents

Heating treatment apparatus and heating treatment method

Heating treatment apparatus and heating treatment method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, FLUID SUPPLY SYSTEM, AND SUBSTRATE...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS M...

SUBSTRATE PROCESSING APPARATUS AND FLUID HEATING DEVICE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND FLUID HEATING DEVICE

HEATING TREATMENT APPARATUS AND HEATING TREATMENT METHOD

HEATING TREATMENT APPARATUS AND HEATING TREATMENT METHOD