TREA

Takahiro HIRANO

Follow

Person

  • Miyagi, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 10,570,512
    • Issue date Feb 25, 2020
    • Tokyo Electron Limited
    • Toshihiko Iwao
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 10,546,725
    • Issue date Jan 28, 2020
    • Tokyo Electron Limited
    • Takahiro Hirano
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 10,370,763
    • Issue date Aug 6, 2019
    • Tokyo Electron Limited
    • Takahiro Hirano
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 10,347,466
    • Issue date Jul 9, 2019
    • Tokyo Electron Limited
    • Takahiro Hirano
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20170342564
    • Publication date Nov 30, 2017
    • TOKYO ELECTRON LIMITED
    • Takahiro HIRANO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20170298514
    • Publication date Oct 19, 2017
    • Takahiro Hirano
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20170236690
    • Publication date Aug 17, 2017
    • TOKYO ELECTRON LIMITED
    • Takahiro HIRANO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20160358758
    • Publication date Dec 8, 2016
    • TOKYO ELECTRON LIMITED
    • Takahiro HIRANO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20150232993
    • Publication date Aug 20, 2015
    • TOKYO ELECTRON LIMITED
    • Toshihiko IWAO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...