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Takahiro Igeta
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Photomask mounting/housing device and resist inspection method and...
Patent number
8,179,523
Issue date
May 15, 2012
NEC Corporation
Yoshikazu Katou
G01 - MEASURING TESTING
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Patent Grant
Photomask mounting/housing device and resist inspection method and...
Patent number
8,009,285
Issue date
Aug 30, 2011
NEC Corporation
Yoshikazu Katou
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
PHOTOMASK MOUNTING/HOUSING DEVICE AND RESIST INSPECTION METHOD AND...
Publication number
20110279816
Publication date
Nov 17, 2011
YOSHIKAZU KATOU
G01 - MEASURING TESTING
Information
Patent Application
PHOTOMASK MOUNTING/HOUSING DEVICE AND RESIST INSPECTION METHOD AND...
Publication number
20090161098
Publication date
Jun 25, 2009
YOSHIKAZU KATOU
G01 - MEASURING TESTING