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Takahiro Inada
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Tokyo, JP
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last 30 patents
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Patent Grant
Charged particle beam apparatus, specimen observation system and op...
Patent number
9,792,832
Issue date
Oct 17, 2017
Hitachi High-Technologies Corporation
Yayoi Konishi
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
CHARGED PARTICLE BEAM APPARATUS, SPECIMEN OBSERVATION SYSTEM AND OP...
Publication number
20150074523
Publication date
Mar 12, 2015
Hitachi High-Technologies Corporation
Yayoi Konishi
G06 - COMPUTING CALCULATING COUNTING