Takahiro INOUE

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Gotenba-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Foil trap and extreme ultraviolet light source device using the foi...
- Patent number 8,076,659
- Issue date Dec 13, 2011
- Ushiodenki Kabushiki Kaisha
- Takahiro Shirai
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
FOIL TRAP AND EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE USING THE FOI...
- Publication number 20080230726
- Publication date Sep 25, 2008
- Ushiodenki Kabushiki Kaisha
- Takahiro SHIRAI
- B82 - NANO-TECHNOLOGY