Takahiro Kawazu

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate liquid processing apparatus
- Patent number 11,869,780
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Takahiro Kawazu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control device and substrate processing method
- Patent number 11,842,904
- Issue date Dec 12, 2023
- Tokyo Electron Limited
- Hiroshi Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,295,966
- Issue date Apr 5, 2022
- Tokyo Electron Limited
- Hiroshi Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 10,985,035
- Issue date Apr 20, 2021
- Tokyo Electron Limited
- Hiromi Hara
- B08 - CLEANING
Information Patent Grant
Etching method, etching apparatus, and storage medium
- Patent number 9,887,092
- Issue date Feb 6, 2018
- Tokyo Electron Limited
- Takahiro Furukawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CONTROL DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20220181172
- Publication date Jun 9, 2022
- TOKYO ELECTRON LIMITED
- Hiroshi Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200194286
- Publication date Jun 18, 2020
- TOKYO ELECTRON LIMITED
- Hiroshi Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND RECORDING MEDIUM
- Publication number 20190080938
- Publication date Mar 14, 2019
- TOKYO ELECTRON LIMITED
- Takahiro Kawazu
- G05 - CONTROLLING REGULATING
Information Patent Application
ETCHING METHOD, ETCHING APPARATUS, AND STORAGE MEDIUM
- Publication number 20160233106
- Publication date Aug 11, 2016
- TOKYO ELECTRON LIMITED
- Takahiro Furukawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20150221530
- Publication date Aug 6, 2015
- TOKYO ELECTRON LIMITED
- Hiromi Hara
- B08 - CLEANING