Takahiro KIMURA

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,986,867
- Issue date May 21, 2024
- SCREEN Holdings Co., Ltd.
- Akira Horikoshi
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210302841
- Publication date Sep 30, 2021
- SCREEN Holdings Co., Ltd.
- Akira Horikoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210086238
- Publication date Mar 25, 2021
- SCREEN Holdings Co., Ltd.
- Akira HORIKOSHI
- H01 - BASIC ELECTRIC ELEMENTS