Takahiro KITANO

Person

Koshi City, Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Computer storage medium to perform a substrate treatment method usi...
- Patent number 11,574,812
- Issue date Feb 7, 2023
- Tokyo Electron Limited
- Makoto Muramatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method and computer storage medium
- Patent number 10,586,711
- Issue date Mar 10, 2020
- Tokyo Electron Limited
- Makoto Muramatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment method using a block copolymer containing a hyd...
- Patent number 10,418,242
- Issue date Sep 17, 2019
- Tokyo Electron Limited
- Makoto Muramatsu
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Substrate treatment method, computer storage medium and substrate t...
- Patent number 10,329,144
- Issue date Jun 25, 2019
- Tokyo Electron Limited
- Makoto Muramatsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pattern forming method and heating apparatus
- Patent number 10,121,659
- Issue date Nov 6, 2018
- Tokyo Electron Limited
- Makoto Muramatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern forming method and heating apparatus
- Patent number 9,859,118
- Issue date Jan 2, 2018
- Tokyo Electron Limited
- Makoto Muramatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment method, computer storage medium and substrate t...
- Patent number 9,810,987
- Issue date Nov 7, 2017
- Tokyo Electron Limited
- Makoto Muramatsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Coating apparatus and nozzle
- Patent number 9,744,551
- Issue date Aug 29, 2017
- Tokyo Electron Limited
- Takayuki Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment method, computer storage medium, and substrate...
- Patent number 9,748,101
- Issue date Aug 29, 2017
- Tokyo Electron Limited
- Makoto Muramatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment method, computer readable storage medium and su...
- Patent number 9,741,583
- Issue date Aug 22, 2017
- Tokyo Electron Limited
- Makoto Muramatsu
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Substrate cleaning method
- Patent number 9,716,002
- Issue date Jul 25, 2017
- Tokyo Electron Limited
- Yasushi Takiguchi
- B08 - CLEANING
Information Patent Grant
Pattern forming method, pattern forming apparatus, and computer rea...
- Patent number 9,618,849
- Issue date Apr 11, 2017
- Tokyo Electron Limited
- Makoto Muramatsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pattern forming method, pattern forming apparatus, and non-transito...
- Patent number 9,530,645
- Issue date Dec 27, 2016
- Tokyo Electron Limited
- Makoto Muramatsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Heating device, coating and developing system, heating method and s...
- Patent number 8,933,376
- Issue date Jan 13, 2015
- Tokyo Electron Limited
- Tetsuo Fukuoka
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Imprint system, imprint method, and non-transitory computer storage...
- Patent number 8,888,920
- Issue date Nov 18, 2014
- Tokyo Electron Limited
- Shoichi Terada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint system for performing a treatment on a template
- Patent number 8,840,728
- Issue date Sep 23, 2014
- Tokyo Electron Limited
- Shoichi Terada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Coating method
- Patent number 8,808,798
- Issue date Aug 19, 2014
- Tokyo Electron Limited
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and comput...
- Patent number 8,578,953
- Issue date Nov 12, 2013
- Tokyo Electron Limited
- Yasushi Takiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating method
- Patent number 8,551,563
- Issue date Oct 8, 2013
- Tokyo Electron Limited
- Takahiro Kitano
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Template treatment method, program, computer storage medium, templa...
- Patent number 8,522,712
- Issue date Sep 3, 2013
- Tokyo Electron Limited
- Koukichi Hiroshiro
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint method, computer storage medium and imprint apparatus
- Patent number 8,468,943
- Issue date Jun 25, 2013
- Tokyo Electron Limited
- Koukichi Hiroshiro
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Hydrophobicizing apparatus, hydrophobicizing method and storage medium
- Patent number 8,430,967
- Issue date Apr 30, 2013
- Tokyo Electron Limited
- Satoshi Shimmura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adhesion promoting process, adhesion promoting device, coating and...
- Patent number 8,304,020
- Issue date Nov 6, 2012
- Tokyo Electron Limited
- Tetsuo Fukuoka
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Coating apparatus and method
- Patent number 8,256,370
- Issue date Sep 4, 2012
- Tokyo Electron Limited
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Capacitor and manufacturing method thereof
- Patent number 8,247,289
- Issue date Aug 21, 2012
- Ibiden Co., Ltd.
- Yoshiki Yamanishi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Coating apparatus and method
- Patent number 8,225,737
- Issue date Jul 24, 2012
- Tokyo Electron Limited
- Takahiro Kitano
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Heating apparatus and heating method
- Patent number 8,217,313
- Issue date Jul 10, 2012
- Tokyo Electron Limited
- Tetsuo Fukuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Heating apparatus, coating and development apparatus, and heating m...
- Patent number 8,025,925
- Issue date Sep 27, 2011
- Tokyo Electron Limited
- Tetsuo Fukuoka
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Developing apparatus and developing method
- Patent number 8,021,062
- Issue date Sep 20, 2011
- Tokyo Electron Limited
- Takanori Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Temperature measuring device using oscillating frequency signals
- Patent number 7,977,609
- Issue date Jul 12, 2011
- Tokyo Electron Limited
- Nobuyuki Sata
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...
- Publication number 20190341255
- Publication date Nov 7, 2019
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND COMPUTER STORAGE MEDIUM
- Publication number 20180269072
- Publication date Sep 20, 2018
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...
- Publication number 20180065843
- Publication date Mar 8, 2018
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PATTERN FORMING METHOD AND HEATING APPARATUS
- Publication number 20180019118
- Publication date Jan 18, 2018
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...
- Publication number 20170287749
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER READABLE STORAGE MEDIUM AND SU...
- Publication number 20170133235
- Publication date May 11, 2017
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- B82 - NANO-TECHNOLOGY
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND COMPUT...
- Publication number 20160314958
- Publication date Oct 27, 2016
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- B08 - CLEANING
Information Patent Application
PATTERN FORMING METHOD AND HEATING APPARATUS
- Publication number 20160293403
- Publication date Oct 6, 2016
- Tokyo Electron Limited
- Makoto MURAMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...
- Publication number 20160124307
- Publication date May 5, 2016
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM, AND SUBSTRATE...
- Publication number 20150255271
- Publication date Sep 10, 2015
- TOKYO ELECTRON LIMITED
- Makoto Muramatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND S...
- Publication number 20150228512
- Publication date Aug 13, 2015
- TOKYO ELECTRON LIMITED
- Makoto Muramatsu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PATTERN FORMING METHOD, PATTERN FORMING APPARATUS, AND NON-TRANSITO...
- Publication number 20150072536
- Publication date Mar 12, 2015
- TOKYO ELECTRON LIMITED
- Makoto Muramatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN FORMING METHOD, PATTERN FORMING APPARATUS, AND COMPUTER REA...
- Publication number 20150062545
- Publication date Mar 5, 2015
- TOKYO ELECTRON LIMITED
- Makoto Muramatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND COMPUT...
- Publication number 20140102474
- Publication date Apr 17, 2014
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING APPARATUS AND NOZZLE
- Publication number 20140000517
- Publication date Jan 2, 2014
- Takayuki Ishii
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COATING METHOD
- Publication number 20120301612
- Publication date Nov 29, 2012
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING APPARATUS AND METHOD
- Publication number 20120213925
- Publication date Aug 23, 2012
- TOKYO ELECTRON LIMITED
- Takahiro KITANO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT METHOD, COMPUTER STORAGE MEDIUM AND IMPRINT APPARATUS
- Publication number 20120152136
- Publication date Jun 21, 2012
- TOKYO ELECTRON LIMITED
- Koukichi Hiroshiro
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
TEMPLATE TREATMENT APPARATUS AND IMPRINT SYSTEM
- Publication number 20120097336
- Publication date Apr 26, 2012
- TOKYO ELECTRON LIMITED
- Shoichi Terada
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT SYSTEM, IMPRINT METHOD, AND NON-TRANSITORY COMPUTER STORAGE...
- Publication number 20120086142
- Publication date Apr 12, 2012
- TOKYO ELECTRON LIMITED
- Shoichi Terada
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT SYSTEM, IMPRINT METHOD, AND NON-TRANSITORY COMPUTER STORAGE...
- Publication number 20120073461
- Publication date Mar 29, 2012
- Shoichi Terada
- B08 - CLEANING
Information Patent Application
VAPORIZING APPARATUS, SUBSTRATE PROCESSING APPARATUS, COATING AND D...
- Publication number 20120034369
- Publication date Feb 9, 2012
- TOKYO ELECTRON LIMITED
- Kazuhiko ITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPLATE TREATMENT METHOD, PROGRAM, COMPUTER STORAGE MEDIUM, TEMPLA...
- Publication number 20110117291
- Publication date May 19, 2011
- TOKYO ELECTRON LIMITED
- Koukichi HIROSHIRO
- B82 - NANO-TECHNOLOGY
Information Patent Application
HYDROPHOBICIZING APPARATUS, HYDROPHOBICIZING METHOD AND STORAGE MEDIUM
- Publication number 20110045166
- Publication date Feb 24, 2011
- TOKYO ELECTRON LIMITED
- Satoshi Shimmura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVELOPING APPARATUS AND DEVELOPING METHOD
- Publication number 20100216077
- Publication date Aug 26, 2010
- TOKYO ELECTRON LIMITED
- Takanori NISHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING APPARATUS AND METHOD
- Publication number 20090285984
- Publication date Nov 19, 2009
- TOKYO ELECTRON LIMITED
- Takahiro KITANO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING APPARATUS AND METHOD
- Publication number 20090285991
- Publication date Nov 19, 2009
- TOKYO ELECTRON LIMITED
- Takahiro Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ADHESION PROMOTING PROCESS, ADHESION PROMOTING DEVICE, COATING AND...
- Publication number 20090207390
- Publication date Aug 20, 2009
- TOKYO ELECTRON LIMITED
- Tetsuo FUKUOKA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Developing Apparatus and Developing Method
- Publication number 20080305434
- Publication date Dec 11, 2008
- Takanori Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HEATING APPARATUS AND HEATING METHOD
- Publication number 20080185370
- Publication date Aug 7, 2008
- TOKYO ELECTRON LIMITED
- Tetsuo Fukuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Takahiro KITANO

Person

Patents Grantslast 30 patents

Computer storage medium to perform a substrate treatment method usi...

Substrate processing method and computer storage medium

Substrate treatment method using a block copolymer containing a hyd...

Substrate treatment method, computer storage medium and substrate t...

Pattern forming method and heating apparatus

Pattern forming method and heating apparatus

Substrate treatment method, computer storage medium and substrate t...

Coating apparatus and nozzle

Substrate treatment method, computer storage medium, and substrate...

Substrate treatment method, computer readable storage medium and su...

Substrate cleaning method

Pattern forming method, pattern forming apparatus, and computer rea...

Pattern forming method, pattern forming apparatus, and non-transito...

Heating device, coating and developing system, heating method and s...

Imprint system, imprint method, and non-transitory computer storage...

Imprint system for performing a treatment on a template

Coating method

Substrate cleaning apparatus, substrate cleaning method, and comput...

Coating method

Template treatment method, program, computer storage medium, templa...

Imprint method, computer storage medium and imprint apparatus

Hydrophobicizing apparatus, hydrophobicizing method and storage medium

Adhesion promoting process, adhesion promoting device, coating and...

Coating apparatus and method

Capacitor and manufacturing method thereof

Coating apparatus and method

Heating apparatus and heating method

Heating apparatus, coating and development apparatus, and heating m...

Developing apparatus and developing method

Temperature measuring device using oscillating frequency signals

Patents Applicationslast 30 patents

SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...

SUBSTRATE PROCESSING METHOD AND COMPUTER STORAGE MEDIUM

SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...

PATTERN FORMING METHOD AND HEATING APPARATUS

SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...

SUBSTRATE TREATMENT METHOD, COMPUTER READABLE STORAGE MEDIUM AND SU...

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND COMPUT...

PATTERN FORMING METHOD AND HEATING APPARATUS

SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...

SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM, AND SUBSTRATE...

SUBSTRATE TREATMENT METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND S...

PATTERN FORMING METHOD, PATTERN FORMING APPARATUS, AND NON-TRANSITO...

PATTERN FORMING METHOD, PATTERN FORMING APPARATUS, AND COMPUTER REA...

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND COMPUT...

COATING APPARATUS AND NOZZLE

COATING METHOD

COATING APPARATUS AND METHOD

IMPRINT METHOD, COMPUTER STORAGE MEDIUM AND IMPRINT APPARATUS

TEMPLATE TREATMENT APPARATUS AND IMPRINT SYSTEM

IMPRINT SYSTEM, IMPRINT METHOD, AND NON-TRANSITORY COMPUTER STORAGE...

IMPRINT SYSTEM, IMPRINT METHOD, AND NON-TRANSITORY COMPUTER STORAGE...

VAPORIZING APPARATUS, SUBSTRATE PROCESSING APPARATUS, COATING AND D...

TEMPLATE TREATMENT METHOD, PROGRAM, COMPUTER STORAGE MEDIUM, TEMPLA...

HYDROPHOBICIZING APPARATUS, HYDROPHOBICIZING METHOD AND STORAGE MEDIUM

DEVELOPING APPARATUS AND DEVELOPING METHOD

COATING APPARATUS AND METHOD

COATING APPARATUS AND METHOD

ADHESION PROMOTING PROCESS, ADHESION PROMOTING DEVICE, COATING AND...

Developing Apparatus and Developing Method

HEATING APPARATUS AND HEATING METHOD