Takahiro KOGA

Follow

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Processing liquid nozzle and cleaning apparatus
- Patent number 12,109,580
- Issue date Oct 8, 2024
- Tokyo Electron Limited
- Daisuke Goto
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 12,051,605
- Issue date Jul 30, 2024
- Tokyo Electron Limited
- Nobuhiro Ogata
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING LIQUID NOZZLE AND CLEANING APPARATUS
- Publication number 20220371041
- Publication date Nov 24, 2022
- TOKYO ELECTRON LIMITED
- Daisuke GOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20220115249
- Publication date Apr 14, 2022
- TOKYO ELECTRON LIMITED
- Nobuhiro OGATA
- H01 - BASIC ELECTRIC ELEMENTS