Takahiro Matsumoto

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Imprint apparatus and method of manufacturing article
- Patent number 10,919,195
- Issue date Feb 16, 2021
- Canon Kabushiki Kaisha
- Kazuhiro Sato
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Illumination apparatus, optical apparatus, imprint apparatus, proje...
- Patent number 10,761,316
- Issue date Sep 1, 2020
- Canon Kabushiki Kaisha
- Takafumi Miyaharu
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Imprint apparatus, imprint method, and method for producing article
- Patent number 10,642,171
- Issue date May 5, 2020
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus, imprinting method, and manufacturing method of a...
- Patent number 10,403,508
- Issue date Sep 3, 2019
- Canon Kabushiki Kaisha
- Yusuke Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Calibration method, measurement apparatus, exposure apparatus, and...
- Patent number 10,401,744
- Issue date Sep 3, 2019
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus and method of manufacturing article
- Patent number 10,300,640
- Issue date May 28, 2019
- Canon Kabushiki Kaisha
- Kazuhiro Sato
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus, illumination optical system, and article manufac...
- Patent number 9,952,440
- Issue date Apr 24, 2018
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint method, imprint apparatus, and article manufacturing method
- Patent number 9,892,949
- Issue date Feb 13, 2018
- Canon Kabushiki Kaisha
- Kazuki Nakagawa
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Position detection apparatus, imprint apparatus, and method for man...
- Patent number 9,689,665
- Issue date Jun 27, 2017
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Interferometer, lithography apparatus, and method of manufacturing...
- Patent number 9,625,836
- Issue date Apr 18, 2017
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint method, imprint apparatus, and article manufacturing method
- Patent number 9,566,741
- Issue date Feb 14, 2017
- Canon Kabushiki Kaisha
- Kazuki Nakagawa
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint method, imprint apparatus, and article manufacturing method
- Patent number 9,201,298
- Issue date Dec 1, 2015
- Canon Kabushiki Kaisha
- Kazuki Nakagawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Measuring apparatus and exposure device
- Patent number 8,902,430
- Issue date Dec 2, 2014
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Drawing apparatus, and method of manufacturing article
- Patent number 8,878,141
- Issue date Nov 4, 2014
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Displacement measurement device, exposure apparatus, and working de...
- Patent number 8,749,761
- Issue date Jun 10, 2014
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Drawing apparatus and method of manufacturing article
- Patent number 8,729,509
- Issue date May 20, 2014
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 8,625,074
- Issue date Jan 7, 2014
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface shape measuring apparatus, exposure apparatus, and device m...
- Patent number 8,564,761
- Issue date Oct 22, 2013
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Measuring apparatus and projection exposure apparatus having the same
- Patent number 8,537,334
- Issue date Sep 17, 2013
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection apparatus, position detection method, exposure a...
- Patent number 8,089,612
- Issue date Jan 3, 2012
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G01 - MEASURING TESTING
Information Patent Grant
Surface shape measurement apparatus and exposure apparatus
- Patent number 7,952,725
- Issue date May 31, 2011
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G01 - MEASURING TESTING
Information Patent Grant
Information processing apparatus for interference signal processing
- Patent number 7,924,426
- Issue date Apr 12, 2011
- Canon Kabushiki Kaisha
- Tomoyuki Miyashita
- G01 - MEASURING TESTING
Information Patent Grant
Shape measuring apparatus, shape measuring method, and exposure app...
- Patent number 7,684,050
- Issue date Mar 23, 2010
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G01 - MEASURING TESTING
Information Patent Grant
Position detecting device and position detecting method
- Patent number 7,643,961
- Issue date Jan 5, 2010
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detecting method
- Patent number 7,576,858
- Issue date Aug 18, 2009
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus having a position detecting system and a wavelen...
- Patent number 7,551,262
- Issue date Jun 23, 2009
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection apparatus and exposure apparatus
- Patent number 7,528,966
- Issue date May 5, 2009
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for adjusting gap between two objects and exposure method us...
- Patent number 7,388,943
- Issue date Jun 17, 2008
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Management system, apparatus, and method, exposure apparatus, and c...
- Patent number 7,385,700
- Issue date Jun 10, 2008
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Management system and apparatus, method therefor, and device manufa...
- Patent number 7,373,213
- Issue date May 13, 2008
- Canon Kabushiki Kaisha
- Satoru Oishi
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
DETECTION APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURI...
- Publication number 20230375956
- Publication date Nov 23, 2023
- Canon Kabushiki Kaisha
- RYO NAKAYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURI...
- Publication number 20220236650
- Publication date Jul 28, 2022
- Canon Kabushiki Kaisha
- Ryo Nakayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20190240880
- Publication date Aug 8, 2019
- Canon Kabushiki Kaisha
- Kazuhiro Sato
- G01 - MEASURING TESTING
Information Patent Application
ILLUMINATION APPARATUS, OPTICAL APPARATUS, IMPRINT APPARATUS, PROJE...
- Publication number 20170285331
- Publication date Oct 5, 2017
- Canon Kabushiki Kaisha
- Takafumi Miyaharu
- G02 - OPTICS
Information Patent Application
IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20170092524
- Publication date Mar 30, 2017
- Canon Kabushiki Kaisha
- Kazuki Nakagawa
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, IMPRINTING METHOD, AND MANUFACTURING METHOD OF A...
- Publication number 20170057153
- Publication date Mar 2, 2017
- Canon Kabushiki Kaisha
- Yusuke Tanaka
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD FOR PRODUCING ARTICLE
- Publication number 20160363874
- Publication date Dec 15, 2016
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20160297117
- Publication date Oct 13, 2016
- Canon Kabushiki Kaisha
- Kazuhiro Sato
- G02 - OPTICS
Information Patent Application
IMPRINT APPARATUS, ILLUMINATION OPTICAL SYSTEM, AND ARTICLE MANUFAC...
- Publication number 20160046045
- Publication date Feb 18, 2016
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G02 - OPTICS
Information Patent Application
IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20160039143
- Publication date Feb 11, 2016
- Canon Kabushiki Kaisha
- Kazuki Nakagawa
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
INTERFEROMETER, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING...
- Publication number 20150022796
- Publication date Jan 22, 2015
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- G01 - MEASURING TESTING
Information Patent Application
CALIBRATION METHOD, MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND...
- Publication number 20150015861
- Publication date Jan 15, 2015
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G01 - MEASURING TESTING
Information Patent Application
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20130168569
- Publication date Jul 4, 2013
- Canon Kabushiki Kaisha
- Wataru YAMAGUCHI
- B82 - NANO-TECHNOLOGY
Information Patent Application
POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND METHOD FOR MAN...
- Publication number 20130163004
- Publication date Jun 27, 2013
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT METHOD IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20130112097
- Publication date May 9, 2013
- Canon Kabushiki Kaisha
- Kazuki Nakagawa
- B82 - NANO-TECHNOLOGY
Information Patent Application
MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTUR...
- Publication number 20130021588
- Publication date Jan 24, 2013
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G01 - MEASURING TESTING
Information Patent Application
DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20120164583
- Publication date Jun 28, 2012
- Canon Kabushiki Kaisha
- Wataru YAMAGUCHI
- B82 - NANO-TECHNOLOGY
Information Patent Application
MEASURING APPARATUS AND EXPOSURE DEVICE
- Publication number 20110176139
- Publication date Jul 21, 2011
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- G01 - MEASURING TESTING
Information Patent Application
DISPLACEMENT MEASUREMENT DEVICE, EXPOSURE APPARATUS, AND WORKING DE...
- Publication number 20110141451
- Publication date Jun 16, 2011
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20100092882
- Publication date Apr 15, 2010
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SURFACE SHAPE MEASUREMENT APPARATUS AND EXPOSURE APPARATUS
- Publication number 20090286172
- Publication date Nov 19, 2009
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G01 - MEASURING TESTING
Information Patent Application
POSITION DETECTION APPARATUS, POSITION DETECTION METHOD, EXPOSURE A...
- Publication number 20090244513
- Publication date Oct 1, 2009
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G01 - MEASURING TESTING
Information Patent Application
SURFACE SHAPE MEASURING APPARATUS, EXPOSURE APPARATUS, AND DEVICE M...
- Publication number 20090219499
- Publication date Sep 3, 2009
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- G01 - MEASURING TESTING
Information Patent Application
SHAPE MEASURING APPARATUS, EXPOSURE APPARATUS, AND COMPUTER
- Publication number 20080285052
- Publication date Nov 20, 2008
- Canon Kabushiki Kaisha
- Tomoyuki Miyashita
- G01 - MEASURING TESTING
Information Patent Application
POSITION DETECTION APPARATUS AND EXPOSURE APPARATUS
- Publication number 20080165368
- Publication date Jul 10, 2008
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SHAPE MEASURING APPARATUS, SHAPE MEASURING METHOD, AND EXPOSURE APP...
- Publication number 20080151258
- Publication date Jun 26, 2008
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G01 - MEASURING TESTING
Information Patent Application
MEASURING APPARATUS, PROJECTION EXPOSURE APPARATUS HAVING THE SAME,...
- Publication number 20080137052
- Publication date Jun 12, 2008
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION DETECTING METHOD
- Publication number 20070188758
- Publication date Aug 16, 2007
- Takahiro Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WAVELENGTH SELECTING METHOD, POSITION DETECTING METHOD AND APPARATU...
- Publication number 20070171392
- Publication date Jul 26, 2007
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ALIGNMENT METHOD AND APPARATUS AND EXPOSURE APPARATUS
- Publication number 20070081161
- Publication date Apr 12, 2007
- Takahiro MATSUMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Takahiro Matsumoto

Person

Patents Grantslast 30 patents

Imprint apparatus and method of manufacturing article

Illumination apparatus, optical apparatus, imprint apparatus, proje...

Imprint apparatus, imprint method, and method for producing article

Imprint apparatus, imprinting method, and manufacturing method of a...

Calibration method, measurement apparatus, exposure apparatus, and...

Imprint apparatus and method of manufacturing article

Imprint apparatus, illumination optical system, and article manufac...

Imprint method, imprint apparatus, and article manufacturing method

Position detection apparatus, imprint apparatus, and method for man...

Interferometer, lithography apparatus, and method of manufacturing...

Imprint method, imprint apparatus, and article manufacturing method

Imprint method, imprint apparatus, and article manufacturing method

Measuring apparatus and exposure device

Drawing apparatus, and method of manufacturing article

Displacement measurement device, exposure apparatus, and working de...

Drawing apparatus and method of manufacturing article

Exposure apparatus and device fabrication method

Surface shape measuring apparatus, exposure apparatus, and device m...

Measuring apparatus and projection exposure apparatus having the same

Position detection apparatus, position detection method, exposure a...

Surface shape measurement apparatus and exposure apparatus

Information processing apparatus for interference signal processing

Shape measuring apparatus, shape measuring method, and exposure app...

Position detecting device and position detecting method

Position detecting method

Exposure apparatus having a position detecting system and a wavelen...

Position detection apparatus and exposure apparatus

Method for adjusting gap between two objects and exposure method us...

Management system, apparatus, and method, exposure apparatus, and c...

Management system and apparatus, method therefor, and device manufa...

Patents Applicationslast 30 patents

DETECTION APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURI...

DETECTION APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURI...

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

ILLUMINATION APPARATUS, OPTICAL APPARATUS, IMPRINT APPARATUS, PROJE...

IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS, IMPRINTING METHOD, AND MANUFACTURING METHOD OF A...

IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD FOR PRODUCING ARTICLE

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

IMPRINT APPARATUS, ILLUMINATION OPTICAL SYSTEM, AND ARTICLE MANUFAC...

IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD

INTERFEROMETER, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING...

CALIBRATION METHOD, MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND...

DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND METHOD FOR MAN...

IMPRINT METHOD IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD

MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTUR...

DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE

MEASURING APPARATUS AND EXPOSURE DEVICE

DISPLACEMENT MEASUREMENT DEVICE, EXPOSURE APPARATUS, AND WORKING DE...

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

SURFACE SHAPE MEASUREMENT APPARATUS AND EXPOSURE APPARATUS

POSITION DETECTION APPARATUS, POSITION DETECTION METHOD, EXPOSURE A...

SURFACE SHAPE MEASURING APPARATUS, EXPOSURE APPARATUS, AND DEVICE M...

SHAPE MEASURING APPARATUS, EXPOSURE APPARATUS, AND COMPUTER

POSITION DETECTION APPARATUS AND EXPOSURE APPARATUS

SHAPE MEASURING APPARATUS, SHAPE MEASURING METHOD, AND EXPOSURE APP...

MEASURING APPARATUS, PROJECTION EXPOSURE APPARATUS HAVING THE SAME,...

POSITION DETECTING METHOD

WAVELENGTH SELECTING METHOD, POSITION DETECTING METHOD AND APPARATU...

ALIGNMENT METHOD AND APPARATUS AND EXPOSURE APPARATUS