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Takahiro MINATANI
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Komaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Flow path switching valve and manufacturing method therefor
Patent number
11,566,723
Issue date
Jan 31, 2023
CKD Corporation
Akihiro Ito
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Spool valve
Patent number
11,125,342
Issue date
Sep 21, 2021
CKD Corporation
Yasuhisa Hirose
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Flow path switching valve and manufacturing method therefor
Patent number
10,907,748
Issue date
Feb 2, 2021
CKD Corporation
Akihiro Ito
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Temperature control system, semiconductor manufacturing device, and...
Patent number
10,553,463
Issue date
Feb 4, 2020
Tokyo Electron Limited
Atsushi Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature control system, semiconductor manufacturing device, and...
Patent number
9,984,908
Issue date
May 29, 2018
Tokyo Electron Limited
Atsushi Kobayashi
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
HEAT EXCHANGE SYSTEM
Publication number
20220187027
Publication date
Jun 16, 2022
CKD CORPORATION
Akihiro ITO
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
FLOW PATH SWITCHING VALVE AND MANUFACTURING METHOD THEREFOR
Publication number
20210108737
Publication date
Apr 15, 2021
CKD CORPORATION
Akihiro ITO
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
SPOOL VALVE
Publication number
20200208745
Publication date
Jul 2, 2020
CKD CORPORATION
Yasuhisa Hirose
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
FLOW PATH SWITCHING VALVE AND MANUFACTURING METHOD THEREFOR
Publication number
20190011052
Publication date
Jan 10, 2019
CKD CORPORATION
Akihiro ITO
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
TEMPERATURE CONTROL SYSTEM, SEMICONDUCTOR MANUFACTURING DEVICE, AND...
Publication number
20180269090
Publication date
Sep 20, 2018
TOKYO ELECTRON LIMITED
Atsushi KOBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROL SYSTEM, SEMICONDUCTOR MANUFACTURING DEVICE, AND...
Publication number
20140262199
Publication date
Sep 18, 2014
TOKYO ELECTRON LIMITED
Atsushi Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROL DEVICE
Publication number
20100116484
Publication date
May 13, 2010
CKD CORPORATION
Norio KOKUBO
F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...