Takahiro MIYAHARA

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Etching method and etching apparatus
- Patent number 10,672,617
- Issue date Jun 2, 2020
- Tokyo Electron Limited
- Hiroki Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating method, film forming method, semiconductor device manufactu...
- Patent number 10,475,665
- Issue date Nov 12, 2019
- Tokyo Electron Limited
- Takahiro Miyahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nitride film forming method and storage medium
- Patent number 10,312,078
- Issue date Jun 4, 2019
- Tokyo Electron Limited
- Hiroki Murakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming nitride film
- Patent number 10,304,676
- Issue date May 28, 2019
- Tokyo Electron Limited
- Takahiro Miyahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nitride film forming method and storage medium
- Patent number 9,972,486
- Issue date May 15, 2018
- Tokyo Electron Limited
- Hiroki Murakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film forming method
- Patent number 9,777,366
- Issue date Oct 3, 2017
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method of SiCN film
- Patent number 9,390,907
- Issue date Jul 12, 2016
- Tokyo Electron Limited
- Akira Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming silicon film
- Patent number 9,293,323
- Issue date Mar 22, 2016
- Tokyo Electron Limited
- Tomoyuki Obu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming seed layer, method of forming silicon film, and f...
- Patent number 9,263,256
- Issue date Feb 16, 2016
- Tokyo Electron Limited
- Tomoyuki Obu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film forming method and film forming apparatus
- Patent number 9,145,604
- Issue date Sep 29, 2015
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon film formation apparatus and method for using same
- Patent number 8,808,452
- Issue date Aug 19, 2014
- Tokyo Electron Limited
- Naotaka Noro
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for forming poly-silicon film
- Patent number 7,923,357
- Issue date Apr 12, 2011
- Tokyo Electron Limited
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20180286691
- Publication date Oct 4, 2018
- TOKYO ELECTRON LIMITED
- Hiroki MURAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING METHOD, FILM FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTU...
- Publication number 20180277389
- Publication date Sep 27, 2018
- TOKYO ELECTRON LIMITED
- Takahiro Miyahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BORON FILM, BORON FILM FORMING METHOD, HARD MASK, AND HARD MASK MAN...
- Publication number 20180090311
- Publication date Mar 29, 2018
- TOKYO ELECTRON LIMITED
- Takahiro MIYAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HARD MASK AND MANUFACTURING METHOD THEREOF
- Publication number 20180090319
- Publication date Mar 29, 2018
- TOKYO ELECTRON LIMITED
- Takahiro Miyahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Forming Nitride Film
- Publication number 20180033608
- Publication date Feb 1, 2018
- TOKYO ELECTRON LIMITED
- Takahiro MIYAHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NITRIDE FILM FORMING METHOD AND STORAGE MEDIUM
- Publication number 20170278705
- Publication date Sep 28, 2017
- TOKYO ELECTRON LIMITED
- Hiroki MURAKAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Nitride Film Forming Method and Storage Medium
- Publication number 20170278697
- Publication date Sep 28, 2017
- TOKYO ELECTRON LIMITED
- Hiroki MURAKAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BORON NITRIDE FILM FORMING METHOD AND SEMICONDUCTOR DEVICE MANUFACT...
- Publication number 20170117145
- Publication date Apr 27, 2017
- TOKYO ELECTRON LIMITED
- Takahiro MIYAHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film Forming Method of SiCN Film
- Publication number 20150348778
- Publication date Dec 3, 2015
- TOKYO ELECTRON LIMITED
- Akira SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM FORMING METHOD
- Publication number 20150270126
- Publication date Sep 24, 2015
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING SILICON FILM AND FILM FORMING APPARATUS
- Publication number 20140187025
- Publication date Jul 3, 2014
- TOKYO ELECTRON LIMITED
- Tomoyuki OBU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SEED LAYER, METHOD OF FORMING SILICON FILM, AND F...
- Publication number 20140187024
- Publication date Jul 3, 2014
- TOKYO ELECTRON LIMITED
- Tomoyuki OBU
- C30 - CRYSTAL GROWTH
Information Patent Application
THIN FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20130084693
- Publication date Apr 4, 2013
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- C30 - CRYSTAL GROWTH
Information Patent Application
SILICON FILM FORMATION APPARATUS AND METHOD FOR USING SAME
- Publication number 20100212581
- Publication date Aug 26, 2010
- TOKYO ELECTRON LIMITED
- Naotaka NORO
- C30 - CRYSTAL GROWTH
Information Patent Application
Method for forming poly-silicon film
- Publication number 20090124077
- Publication date May 14, 2009
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Takahiro MIYAHARA

Person

Patents Grantslast 30 patents

Etching method and etching apparatus

Heating method, film forming method, semiconductor device manufactu...

Nitride film forming method and storage medium

Method and apparatus for forming nitride film

Nitride film forming method and storage medium

Thin film forming method

Film forming method of SiCN film

Method of forming silicon film

Method of forming seed layer, method of forming silicon film, and f...

Thin film forming method and film forming apparatus

Silicon film formation apparatus and method for using same

Method for forming poly-silicon film

Patents Applicationslast 30 patents

ETCHING METHOD AND ETCHING APPARATUS

HEATING METHOD, FILM FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTU...

BORON FILM, BORON FILM FORMING METHOD, HARD MASK, AND HARD MASK MAN...

HARD MASK AND MANUFACTURING METHOD THEREOF

Method and Apparatus for Forming Nitride Film

NITRIDE FILM FORMING METHOD AND STORAGE MEDIUM

Nitride Film Forming Method and Storage Medium

BORON NITRIDE FILM FORMING METHOD AND SEMICONDUCTOR DEVICE MANUFACT...

Film Forming Method of SiCN Film

THIN FILM FORMING METHOD

METHOD OF FORMING SILICON FILM AND FILM FORMING APPARATUS

METHOD OF FORMING SEED LAYER, METHOD OF FORMING SILICON FILM, AND F...

THIN FILM FORMING METHOD AND FILM FORMING APPARATUS

SILICON FILM FORMATION APPARATUS AND METHOD FOR USING SAME

Method for forming poly-silicon film