Takahiro Miyakawa

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Patents Grantslast 30 patents

Information Patent Grant
Measuring apparatus, imprint system, measuring method, and device m...
- Patent number 8,976,370
- Issue date Mar 10, 2015
- Canon Kabushiki Kaisha
- Takahiro Miyakawa
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MEASURING APPARATUS, IMPRINT SYSTEM, MEASURING METHOD, AND DEVICE M...
- Publication number 20140153003
- Publication date Jun 5, 2014
- Takahiro Miyakawa
- G01 - MEASURING TESTING