Takahiro Nanba

Person

  • Shizuoka, JP

Patents Applicationslast 30 patents

  • Information Patent Application

    Film Forming Method

    • Publication number 20220056571
    • Publication date Feb 24, 2022
    • Ulvac, Inc.
    • Kengo Tsutsumi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS

    • Publication number 20200243310
    • Publication date Jul 30, 2020
    • ULVAC, Inc.
    • Tsuyoshi KAGAMI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SPUTTERING APPARATUS

    • Publication number 20180057928
    • Publication date Mar 1, 2018
    • Ulvac, Inc.
    • Hiroki Yamamoto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    INSULATOR TARGET

    • Publication number 20170178875
    • Publication date Jun 22, 2017
    • Ulvac, Inc.
    • Shinji Kohari
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF MANUFACTURING CHUCK PLATE FOR USE IN ELECTROSTATIC CHUCK

    • Publication number 20110256810
    • Publication date Oct 20, 2011
    • Takahiro Nanba
    • H01 - BASIC ELECTRIC ELEMENTS