Takahiro Sakamoto

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system, substrate processing method and comput...
- Patent number 11,858,092
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Munehisa Kodama
- B24 - GRINDING POLISHING
Information Patent Grant
Coating apparatus and nozzle
- Patent number 9,744,551
- Issue date Aug 29, 2017
- Tokyo Electron Limited
- Takayuki Ishii
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
REMOVING APPARATUS
- Publication number 20230105522
- Publication date Apr 6, 2023
- TOKYO ELECTRON LIMITED
- Takahiro SAKAMOTO
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD AND COMPUT...
- Publication number 20200139503
- Publication date May 7, 2020
- TOKYO ELECTRON LIMITED
- Munehisa KODAMA
- B24 - GRINDING POLISHING
Information Patent Application
COATING APPARATUS AND NOZZLE
- Publication number 20140000517
- Publication date Jan 2, 2014
- Takayuki Ishii
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...