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Takahiro Sakuragi
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Tokyo, JP
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last 30 patents
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Patent Grant
Plasma processing apparatus
Patent number
12,014,903
Issue date
Jun 18, 2024
HITACHI HIGH-TECH CORPORATION
Tetsuo Kawanabe
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Operation method of vacuum processing device
Patent number
12,002,692
Issue date
Jun 4, 2024
HITACHI HIGH-TECH CORPORATION
Ryoichi Isomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Operation method of vacuum processing device
Patent number
11,195,733
Issue date
Dec 7, 2021
HITACHI HIGH-TECH CORPORATION
Ryoichi Isomura
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20220415618
Publication date
Dec 29, 2022
Hitachi High-Tech Corporation
Tetsuo Kawanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPERATION METHOD OF VACUUM PROCESSING DEVICE
Publication number
20220051917
Publication date
Feb 17, 2022
HITACHI HIGH-TECH CORPORATION
Ryoichi Isomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPERATION METHOD OF VACUUM PROCESSING DEVICE
Publication number
20190295871
Publication date
Sep 26, 2019
Hitachi High-Technologies Corporation
Ryoichi ISOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20150114568
Publication date
Apr 30, 2015
Hitachi High-Technologies Corporation
Yutaka Kudo
H01 - BASIC ELECTRIC ELEMENTS