Takahiro Shimoda

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Device and method for monitoring process exhaust gas, semiconductor...
- Patent number 7,229,843
- Issue date Jun 12, 2007
- Tokyo Electron Limited
- Kiyoshi Komiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device and method for monitoring process exhaust gas, semiconductor...
- Patent number 6,942,891
- Issue date Sep 13, 2005
- Tokyo Electron Limited
- Kiyoshi Komiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning fluid and cleaning method for component of semiconductor-t...
- Patent number 6,805,135
- Issue date Oct 19, 2004
- Nittou Chemical Industries, Ltd.
- Kenichi Hirota
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Method and apparatus for monitoring process exhaust gas, semiconduc...
- Patent number 6,716,477
- Issue date Apr 6, 2004
- Tokyo Electron Limited
- Kiyoshi Komiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus for substrates to be processed
- Patent number 5,704,981
- Issue date Jan 6, 1998
- Tokyo Electron Ltd.
- Shunji Kawakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Device and method for monitoring process exhaust gas, semiconductor...
- Publication number 20050159899
- Publication date Jul 21, 2005
- TOKYO ELECTRON LIMITED
- Kiyoshi Komiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Device and method for monitoring process exhaust gas, semiconductor...
- Publication number 20040157347
- Publication date Aug 12, 2004
- TOKYO ELECTRON LIMITED
- Kiyoshi Komiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...